US2021175063A1PendingUtilityA1
Axial ci source - off-axis electron beam
Est. expiryDec 10, 2039(~13.3 yrs left)· nominal 20-yr term from priority
H01J 49/145H01J 49/147H01J 49/067H01J 49/26
62
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Claims
Abstract
An ion source includes an electron generator, an ionization chamber, and a magnetic field. The electron generator is configured to produce electrons. The ionization chamber has an electron entrance aperture through a first wall, an ion exit aperture through a second wall, and an axis. The ionization chamber is configured to produce ions. The magnetic field is arranged to confine electrons in a beam directed through the electron entrance aperture, in a direction within 45 degrees of parallel to the axis, and towards a location displaced from the ion exit aperture.
Claims
exact text as granted — not AI-modified1 . An ion source comprising:
an electron generator configured to produce electrons; an ionization chamber having an electron entrance aperture through a first wall, an ion exit aperture through a second wall, and an axis, the ionization chamber configured to produce ions; a magnetic field arranged to confine electrons in a beam directed through the electron entrance aperture, in a direction within 45 degrees of parallel to the axis, and towards a location displaced from the ion exit aperture; and an ion optic configured to direct ions exiting the ion exit aperture in an ion beam along the axis.
2 . The ion source of claim 1 wherein the ionization chamber is configured to produce ions by chemical ionization.
3 . The ion source of claim 1 wherein the location is on the second wall.
4 . The ion source of claim 1 wherein the electron beam is parallel to the axis but offset from the ion beam in a direction orthogonal to the axis.
5 . The ion source of claim 1 wherein the electron beam intersects a line along the direction of the ion beam.
6 . The ion source of claim 1 wherein the ionization chamber further includes a recess on the second wall and displaced from the ion exit aperture, and the electron beam is directed towards the recess.
7 . A mass spectrometer comprising:
an ion source of claim 1 ; and a mass analyzer.
8 . A method comprising:
generating electrons; directing electrons in a beam through an electron entrance aperture through a first wall of an ionization chamber and towards a location displaced from an ion exit aperture through a second wall of the ionization chamber, and in a direction within 45 degrees of parallel to an axis of the ionization chamber; producing ions within the ionization chamber; and directing ions as a beam through the ion exit aperture and in a direction parallel to the axis of the ionization chamber.
9 . The method of claim 8 wherein producing ions within the ionization chamber includes producing ions by chemical ionization.
10 . The method of claim 8 wherein the location is on the second wall.
11 . The method of claim 8 wherein directing the electron beam includes directing the electron beam in a direction parallel to the axis but offset from the ion beam in a direction orthogonal to the axis.
12 . The method of claim 8 wherein directing the electron beam includes directing the electron beam to intersect a line along the direction of the ion beam.
13 . The method of claim 8 wherein directing the electron beam includes directing the electron beam towards a recess on the second wall of the ionization chamber and displaced from the ion exit aperture.
14 . An ion source comprising:
an electron generator configured to produce electrons; an ionization chamber having an electron entrance aperture through a first wall and an ion exit aperture through a second wall, the ionization chamber configured to produce ions; a magnetic field arranged to confine electrons in a beam directed through the electron entrance aperture; an electron dispersive mechanism configured to disperse the electrons within the ionization chamber.
15 . The ion source of claim 14 wherein the ionization chamber is configured to produce ions by chemical ionization.
16 . The ion source of claim 14 wherein the first wall and the second wall are opposite from one another.
17 . The ion source of claim 14 wherein the electron dispersive mechanism includes a magnetic shielding configured to reduce the magnetic fields within at least a portion of the ionization chamber.
18 . The ion source of claim 14 wherein the electron dispersive mechanism includes one or more additional magnets oriented to disrupt the magnetic field.
19 . The ion source of claim 14 wherein the electron dispersive mechanism includes an electrostatic lens configured to direct electrons away from the ion exit aperture without substantially affecting the ion beam.
20 . A mass spectrometer comprising:
an ion source of claim 14 ; and a mass analyzer.
21 . A method comprising:
generating electrons; directing electrons in a beam through an electron entrance aperture of an ionization chamber; dispersing the electrons within the ionization chamber; producing ions within the ionization chamber; and directing the ions as a beam through the ion exit aperture.
22 . The method of claim 21 wherein producing ions within the ionization chamber includes producing ions by chemical ionization.Join the waitlist — get patent alerts
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