US2021159142A1PendingUtilityA1

Manufacturing method of chip package structure

Assignee: UNIMICRON TECHNOLOGY CORPPriority: Oct 17, 2018Filed: Feb 2, 2021Published: May 27, 2021
Est. expiryOct 17, 2038(~12.2 yrs left)· nominal 20-yr term from priority
H10W 90/794H10W 80/00H10W 72/00H10W 70/685H10W 70/68H10W 70/65H10W 70/05H10W 70/682H10W 72/073H10W 72/072H10W 74/15H10W 72/877H10W 72/07333H10W 90/724H10W 72/252H10W 90/736H10W 90/734H10W 70/635H10W 40/228H10W 40/22H10W 40/10H01L 24/89H01L 23/13H01L 23/49838H01L 24/08H01L 21/4857H01L 2224/08225H01L 23/49822H01L 23/3675H01L 2224/80001
55
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Claims

Abstract

A chip package structure includes a circuit structure, a redistribution structure, a heat conductive component, a chip, and a heat sink. The circuit structure includes a first circuit layer. The redistribution structure is disposed on the circuit structure and includes a second circuit layer, wherein the redistribution structure has an opening. The heat conductive component is disposed on the circuit structure and covered by the redistribution structure. The heat conductive component has a horizontal portion and a vertical portion. The horizontal portion extends toward the opening until it exceeds the opening. The vertical portion extends upward beyond the top surface of the redistribution structure from a part of the horizontal portion. The chip is disposed in the opening, and the bottom of the chip contacts the heat conductive component. The heat sink is disposed over the redistribution structure and the chip.

Claims

exact text as granted — not AI-modified
What is claimed is: 
     
         1 . A method for manufacturing a chip package, the method comprising the operations of:
 (i) providing a precursor structure, wherein the precursor structure comprises:   a circuit structure comprising a first circuit layer;   a redistribution precursor structure disposed on the circuit structure and comprising a second circuit layer electrically connected with the first circuit layer;   a heat conductive component disposed over the circuit structure and comprising:   a horizontal portion embedded in the redistribution precursor structure; and   a vertical portion extending upward from the horizontal portion and beyond a top surface of the redistribution precursor structure; and   a patterned release film disposed on the circuit structure and covered by the redistribution precursor structure, wherein the patterned release film covers a part of the horizontal portion of the heat conductive component and a connection pad electrically connected with the first circuit layer;   (ii) removing the patterned release film and a part of the redistribution precursor structure above the patterned release film to form an opening, wherein the opening exposes the connection pad and the part of the horizontal portion of the heat conductive component;   (iii) disposing a chip in the opening, wherein the chip is electrically connected to the connection pad and a bottom of chip contacts the part of the horizontal portion of the heat conductive component; and   (iv) attaching a heat sink to the chip and the vertical portion of the heat conductive component.   
     
     
         2 . The method according to  claim 1 , wherein the operation (iv) is performed by ultrasonic welding. 
     
     
         3 . The method according to  claim 1 , wherein the operation (ii) comprises:
 (a) employing a laser drilling process to remove a part of the redistribution precursor structure which is in a vertical projection of a periphery of the patterned release film; and   (b) removing the patterned release film and the part of the redistribution precursor structure above the patterned release film.   
     
     
         4 . The method according to  claim 1 , wherein the operation (i) comprises the steps of:
 (v) forming the horizontal portion of the heat conductive component on the circuit structure;   (vi) forming the redistribution precursor structure to cover the horizontal portion of the heat conductive component;   (vii) patterning the redistribution precursor structure to form a through hole exposing a part of the horizontal portion of the heat conductive component; and   (viii) forming the vertical portion of the heat conductive component in the through hole.

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