Magnetic sensor

Abstract

A magnetic sensor includes a magnetic sensor tip that includes a magnetoresistive effect element and a sealed part. The magnetoresistive effect element includes a free layer and a pinned layer. The sealed part has a first surface and a second surface, which is opposite the first surface. The shape of the sealed part in the plan view from the first surface side is substantially quadrilateral. The substantially quadrilateral shape has a first side and a second side, which are substantially parallel to each other. In the plan view, from the first surface side of the sealed part, the magnetization direction of the pinned layer, in a state in which the external magnetic field is not applied on the magnetoresistive effect element, is inclined with respect to an approximately straight line found through the least squares method using a plurality of points arbitrarily set on the first side.

1 . A magnetic sensor comprising:
 a magnetic sensor tip that includes a magnetoresistive effect element; and   a sealed part that seals the magnetic sensor tip;   wherein the magnetoresistive effect element includes a free layer, the magnetization direction of which can change in accordance with an external magnetic field, and a pinned layer, the magnetization direction of which is fixed;   the sealed part has a first surface and a second surface, which is opposite the first surface;   the shape of the sealed part in the plan view from the first surface side is substantially quadrilateral;   the substantially quadrilateral shape has a first side and a second side, which are substantially parallel to each other, and a third side and a fourth side, which are substantially parallel to each other and that intersect the first side and the second side; and   in the plan view from the first surface side of the sealed part, the magnetization direction of the pinned layer, in a state in which the external magnetic field is not applied on the magnetoresistive effect element, is inclined with respect to an approximately straight line found through the least squares method using a plurality of points arbitrarily set on the first side.   
     
     
         2 . The magnetic sensor according to  claim 1 , wherein the magnetization direction of the pinned layer, in a state in which the external magnetic field is not applied on the magnetoresistive effect element, is inclined at an angle of 10˜80° with respect to the approximately straight line. 
     
     
         3 . The magnetic sensor according to  claim 1 , wherein:
 the shape in the plan view of the magnetic sensor tip is substantially a quadrilateral having a first side and a second side substantially parallel to each other, and a third side and a fourth side substantially parallel to each other and intersecting the first side and the second side;   the first side of the magnetic sensor tip and the approximately straight line are substantially parallel; and   when the magnetic sensor tip is viewed from the first surface side of the sealed part, the magnetization direction of the pinned layer in a state in which the external magnetic field is not applied on the magnetoresistive effect element is inclined with respect to the first side of the magnetic sensor tip.   
     
     
         4 . The magnetic sensor according to  claim 1 , wherein:
 the shape in the plan view of the magnetic sensor tip is substantially a quadrilateral having a first side and a second side, which are substantially parallel to each other, and a third side and a fourth side, which are substantially parallel to each other and which intersect the first side and the second side; and   when the magnetic sensor tip is viewed from the first surface side of the sealed part, the magnetization direction of the pinned layer, in a state in which the external magnetic field is not applied on the magnetoresistive effect element, is substantially parallel to or substantially orthogonal to the first side of the magnetic sensor tip, and the first side of the magnetic sensor tip is inclined with respect to the approximately straight line.   
     
     
         5 . The magnetic sensor according to  claim 1 , wherein:
 the magnetic sensor tip includes a plurality of the magnetoresistive effect elements; and   the magnetization directions of the free layers of the magnetoresistive effect elements in a state in which the external magnetic field is not applied on the plurality of magnetoresistive effect elements correspond to each other.   
     
     
         6 . The magnetic sensor according to  claim 1 , wherein the magnetoresistive effect element is a GMR element or a TMR element. 
     
     
         7 . The magnetic sensor according to  claim 1 , wherein the sealed part includes a resin.