US2021143348A1PendingUtilityA1

Crosslinkable polymeric materials for dielectric layers in electronic devices

Assignee: ALTANA AGPriority: Nov 18, 2015Filed: Jan 11, 2021Published: May 13, 2021
Est. expiryNov 18, 2035(~9.3 yrs left)· nominal 20-yr term from priority
H10D 1/68C08F 12/18C08F 20/40C08F 20/28C08F 12/32C08F 20/22H01L 51/004H01L 51/052H01L 28/40H01L 51/0043H10K 85/151H10K 10/471H10K 85/141
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Claims

Abstract

Compositions for providing a dielectric layer in an electronic device wherein the composition comprises a polymer which polymer contains one or more building blocks, wherein at least 25 mol % of the total number of building blocks in the polymer are of the general formula having olefinic oligo-dihydrodicyclopentadienyl functionalities.

Claims

exact text as granted — not AI-modified
1 . A composition for providing a dielectric layer in an electronic device, the composition comprising:
 a polymer containing one or more units, wherein at least 25 mol % of the total number of units in the polymer are the following units (A) with crosslinkable side groups,   
       
         
           
           
               
               
           
         
         in which
 X independently at each occurrence is a methylene group or oxygen, 
 R independently at each occurrence is a methyl group or hydrogen, 
 L 1  is a divalent group which connects the polymer chain to the side group, and 
 L 2  is a divalent group which connects the polymer chain to the side group. 
 
       
     
     
         2 . The composition according to  claim 1 , wherein
 L 1  is selected from the group consisting of carbonyl, carbonyloxyethyl, carbonyloxyisopropyl, carbonyloxyethylamide, phenyl and benzyl groups;   X is CH 2 ;   R independently is CH 3  or H;   n is 0.   
     
     
         3 . The composition according to  claim 1 , wherein
 L 1  is a carbonyl or carbonyloxyethyl group;   R is CH 3  or H   n is 0.   
     
     
         4 . The composition according to  claim 1 , wherein
 L 1,2  is a carbonyl unit;   X is CH 2 ;   R is H.   n is 0.   
     
     
         5 - 6 . (canceled) 
     
     
         7 . The composition according to  claim 1 , wherein the polymer further comprises a unit derived from a methacrylate having a linear, branched or cyclic hydrocarbon group which comprises 1-18 carbon atoms. 
     
     
         8 . The composition according to  claim 1 , wherein the polymer further comprises a unit derived from any of  claims 1  to  7 , characterized in that a further unit comprises styrene, ethylene, methyl vinyl ether or octadecene. 
     
     
         9 . The composition according to  claim 1 , wherein the polymer further comprises one of the following units or combination of units: 
       
         
           
           
               
               
           
         
         
           
           
               
               
           
         
       
     
     
         10 - 15 . (canceled) 
     
     
         16 . The composition according to  claim 7 , wherein at least some hydrogen atoms of the hydrocarbon group are substituted with fluorine atoms. 
     
     
         17 . An electronic device comprising at least one dielectric layer, wherein the at least one dielectric layer comprises:
 a) a crosslinked polymer obtained by polymerizing monomers to obtain a polymer including at least 25 mol % of the following units (A) with crosslinkable side groups, and then crosslinking the crosslinkable side groups:   
       
         
           
           
               
               
           
         
         in which
 X independently at each occurrence is a methylene group or oxygen, 
 R independently at each occurrence is a methyl group or hydrogen, 
 L 1  is a divalent group which connects the polymer chain to the side group and 
 L 2  is a divalent group which connects the polymer chain to the side group. 
 
       
     
     
         18 . An electronic device comprising a thin-film capacitor including at least one dielectric layer, wherein the at least one dielectric layer comprises:
 a) a crosslinked polymer obtained by polymerizing monomers to obtain a polymer including at least 25 mol % of the following units (A) with crosslinkable side groups, and then crosslinking the crosslinkable side groups:   
       
         
           
           
               
               
           
         
         in which
 X independently at each occurrence is a methylene group or oxygen, 
 R independently at each occurrence is a methyl group or hydrogen, 
 L 1  is a divalent group which connects the polymer chain to the side group, and 
 L 2  is a divalent group which connects the polymer chain to the side group. 
 
       
     
     
         19 . The electronic device according to  claim 17 , further comprising an additional polymer. 
     
     
         20 . The electronic device according to  claim 17 , further comprising one or more of a free radical photoinitiator, a stabilizer, and an adhesion promoter.

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