US2021143348A1PendingUtilityA1
Crosslinkable polymeric materials for dielectric layers in electronic devices
Est. expiryNov 18, 2035(~9.3 yrs left)· nominal 20-yr term from priority
H10D 1/68C08F 12/18C08F 20/40C08F 20/28C08F 12/32C08F 20/22H01L 51/004H01L 51/052H01L 28/40H01L 51/0043H10K 85/151H10K 10/471H10K 85/141
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Claims
Abstract
Compositions for providing a dielectric layer in an electronic device wherein the composition comprises a polymer which polymer contains one or more building blocks, wherein at least 25 mol % of the total number of building blocks in the polymer are of the general formula having olefinic oligo-dihydrodicyclopentadienyl functionalities.
Claims
exact text as granted — not AI-modified1 . A composition for providing a dielectric layer in an electronic device, the composition comprising:
a polymer containing one or more units, wherein at least 25 mol % of the total number of units in the polymer are the following units (A) with crosslinkable side groups,
in which
X independently at each occurrence is a methylene group or oxygen,
R independently at each occurrence is a methyl group or hydrogen,
L 1 is a divalent group which connects the polymer chain to the side group, and
L 2 is a divalent group which connects the polymer chain to the side group.
2 . The composition according to claim 1 , wherein
L 1 is selected from the group consisting of carbonyl, carbonyloxyethyl, carbonyloxyisopropyl, carbonyloxyethylamide, phenyl and benzyl groups; X is CH 2 ; R independently is CH 3 or H; n is 0.
3 . The composition according to claim 1 , wherein
L 1 is a carbonyl or carbonyloxyethyl group; R is CH 3 or H n is 0.
4 . The composition according to claim 1 , wherein
L 1,2 is a carbonyl unit; X is CH 2 ; R is H. n is 0.
5 - 6 . (canceled)
7 . The composition according to claim 1 , wherein the polymer further comprises a unit derived from a methacrylate having a linear, branched or cyclic hydrocarbon group which comprises 1-18 carbon atoms.
8 . The composition according to claim 1 , wherein the polymer further comprises a unit derived from any of claims 1 to 7 , characterized in that a further unit comprises styrene, ethylene, methyl vinyl ether or octadecene.
9 . The composition according to claim 1 , wherein the polymer further comprises one of the following units or combination of units:
10 - 15 . (canceled)
16 . The composition according to claim 7 , wherein at least some hydrogen atoms of the hydrocarbon group are substituted with fluorine atoms.
17 . An electronic device comprising at least one dielectric layer, wherein the at least one dielectric layer comprises:
a) a crosslinked polymer obtained by polymerizing monomers to obtain a polymer including at least 25 mol % of the following units (A) with crosslinkable side groups, and then crosslinking the crosslinkable side groups:
in which
X independently at each occurrence is a methylene group or oxygen,
R independently at each occurrence is a methyl group or hydrogen,
L 1 is a divalent group which connects the polymer chain to the side group and
L 2 is a divalent group which connects the polymer chain to the side group.
18 . An electronic device comprising a thin-film capacitor including at least one dielectric layer, wherein the at least one dielectric layer comprises:
a) a crosslinked polymer obtained by polymerizing monomers to obtain a polymer including at least 25 mol % of the following units (A) with crosslinkable side groups, and then crosslinking the crosslinkable side groups:
in which
X independently at each occurrence is a methylene group or oxygen,
R independently at each occurrence is a methyl group or hydrogen,
L 1 is a divalent group which connects the polymer chain to the side group, and
L 2 is a divalent group which connects the polymer chain to the side group.
19 . The electronic device according to claim 17 , further comprising an additional polymer.
20 . The electronic device according to claim 17 , further comprising one or more of a free radical photoinitiator, a stabilizer, and an adhesion promoter.Join the waitlist — get patent alerts
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