Semiconductor device and semiconductor device production system

Abstract

A semiconductor device production system using a laser crystallization method is provided which can avoid forming grain boundaries in a channel formulation region of a TFT, thereby preventing grain boundaries rom lowering the mobility of the TFT greatly, from lowering ON current, and from increasing OFF current. Rectangular or stripe pattern depression and projection portions are formed on an insulating film. A semiconductor film is formed on the insulating film. The semiconductor film is irradiated with continuous wave laser light by running the laser light along the stripe pattern depression and projection portions of the insulating film or along the major or minor axis direction of the rectangle. Although continuous wave laser light is most preferred among laser light, it is also possible to use pulse oscillation laser light in irradiating the semiconductor film.

1 . (canceled) 
     
     
         2 . An electronic apparatus comprising:
 a display unit comprising a semiconductor device comprising:
 a substrate; 
 a pixel portion over the substrate, the pixel portion comprising:
 a surface comprising a first projection portion and a first depression portion; 
 a polycrystalline semiconductor film over the surface; 
 a gate insulating film over the polycrystalline semiconductor film; 
 a gate electrode over the gate insulating film; 
 an insulating film over the gate electrode; and 
 an electrode connected to a top surface of the polycrystalline semiconductor film through an opening in the insulating film and the gate insulating film; and 
 
 a driving circuit over the substrate, 
   wherein the gate electrode and the first projection portion overlap each other, and   wherein the electrode is in contact with a top surface of the insulating film.   
     
     
         3 . The electronic apparatus according to  claim 2 ,
 wherein a surface of the polycrystalline semiconductor film comprises a second projection and a second depression.   
     
     
         4 . The electronic apparatus according to  claims 2 ,
 wherein the polycrystalline semiconductor film is in contact with an insulating material at the first projection portion.   
     
     
         5 . The electronic apparatus according to  claim 2 ,
 wherein the electrode overlaps with the first projection portion and the first depression portion.   
     
     
         6 . The electronic apparatus according to  claim 2 ,
 wherein a width of the first projection portion is 300 to 3000 nm.   
     
     
         7 . The electronic apparatus according to  claim 2 , further comprising at least one of a speaker, an audio input unit, a battery, and an operating key. 
     
     
         8 . An electronic apparatus comprising:
 a display unit comprising a semiconductor device comprising:
 a substrate; 
 a pixel portion over the substrate, the pixel portion comprising:
 a surface comprising a first projection portion and a first depression portion; 
 a polycrystalline semiconductor film over the surface, the polycrystalline semiconductor film comprising a channel region, a first impurity region, and a second impurity region; 
 a gate insulating film over the polycrystalline semiconductor film; 
 a gate electrode over the gate insulating film; 
 an insulating film over the gate electrode; and 
 an electrode connected to a top surface of the first impurity region through an opening in the insulating film and the gate insulating film; and 
 
 a driving circuit over the substrate, 
   wherein the channel region is between the first impurity region and the second impurity region,   wherein the gate electrode and the channel region overlap each other,   wherein the channel region and the first projection portion overlap each other, and   wherein the electrode is in contact with a top surface of the insulating film.   
     
     
         9 . The electronic apparatus according to  claim 8 ,
 wherein a surface of the polycrystalline semiconductor film comprises a second projection and a second depression.   
     
     
         10 . The electronic apparatus according to  claim 8 ,
 wherein the polycrystalline semiconductor film is in contact with an insulating material at the first projection portion.   
     
     
         11 . The electronic apparatus according to  claim 8 ,
 wherein the electrode overlaps with the first projection portion and the first depression portion.   
     
     
         12 . The electronic apparatus according to  claim 8 ,
 wherein a width of the first projection portion is 300 to 3000 nm.   
     
     
         13 . The electronic apparatus according to  claim 8 , further comprising at least one of a speaker, an audio input unit, a battery, and an operating key. 
     
     
         14 . An electronic apparatus comprising:
 a display unit comprising a semiconductor device comprising:
 a plastic substrate; 
 a pixel portion over the plastic substrate, the pixel portion comprising:
 a surface comprising a first projection portion and a first depression portion; 
 a polycrystalline semiconductor film over the surface; 
 a gate insulating film over the polycrystalline semiconductor film; 
 a gate electrode over the gate insulating film; 
 an insulating film over the gate electrode; and 
 an electrode connected to a top surface of the polycrystalline semiconductor film through an opening in the insulating film and the gate insulating film; and 
 
 a driving circuit over the plastic substrate, 
   wherein the gate electrode and the first projection portion overlap each other, and   wherein the electrode is in contact with a top surface of the insulating film.   
     
     
         15 . The electronic apparatus according to  claim 14 ,
 wherein a surface of the polycrystalline semiconductor film comprises a second projection and a second depression.   
     
     
         16 . The electronic apparatus according to  claim 14 ,
 wherein the polycrystalline semiconductor film is in contact with an insulating material at the first projection portion.   
     
     
         17 . The electronic apparatus according to  claim 14 ,
 wherein the electrode overlaps with the first projection portion and the first depression portion.   
     
     
         18 . The electronic apparatus according to  claim 14 ,
 wherein a width of the first projection portion is 300 to 3000 nm.   
     
     
         19 . The electronic apparatus according to  claim 14 , further comprising at least one of a speaker, an audio input unit, a battery, and an operating key.