Vapor deposition mask, vapor deposition method, and production method for organic el display device

Abstract

Provided is a vapor deposition mask that suppresses heat conduction at a frame thereof, that achieves weight reduction, and that can tolerate high stress at a portion of the frame to which particularly high stress is applied. The present invention has: a mask main body (10) at which an opening pattern is formed; and a frame (15) to which at least a portion of a peripheral edge part of the mask main body is joined. At least a portion of the frame is formed as a rod-like lateral frame (15b) that is formed by laminating, via connection surface plates (153), unit structures (155) for a sandwich structure in which a surface plate (152) is stuck to a surface that faces at least portions of core parts (151) that contain vacant space.

1 . A quadrangular columnar-shaped body comprising:
 a plurality of unit structure bodies being stacked, each of the plurality of unit structure bodies having a sandwich structure comprising a core portion having a vacant space penetrating the core portion and end plates closing the vacant space at opposite end surfaces of the core portion, wherein each of the plurality of unit structure bodies is stacked, via the end plates, in a direction through which the vacant space penetrates,   wherein the quadrangular columnar-shaped body has a quadrilateral form of several ten millimeters at each side and a length of 900 millimeters or greater in the direction through which the vacant space penetrates.   
     
     
         2 . The quadrangular columnar-shaped body according to  claim 1 , wherein one or more end plates are formed, the one or more end plates covering the plurality of unit structure bodies over the entire periphery of the plurality of unit structure bodies from an orientation being perpendicular to a direction stacked with the plurality of unit structure bodies. 
     
     
         3 . The quadrangular columnar-shaped body according to  claim 1 , wherein an interior of the vacant space is brought to negative pressure or filled up with a rare gas. 
     
     
         4 . A quadrangular columnar-shaped body comprising:
 a plurality of unit structure bodies being stacked, each of the plurality of unit structure bodies having a sandwich structure comprising a core portion having a vacant space penetrating the core portion and end plates closing the vacant space at opposed end portions of the core portion, wherein each of the plurality of unit structure bodies is stacked, via the end plates, in a direction through which the vacant space penetrates,   wherein an interior of the vacant space is brought to negative pressure or sealed with a rare gas.   
     
     
         5 . The quadrangular columnar-shaped body according to  claim 1 , wherein the core portion is formed using a silicon carbide fiber reinforced plastic having a silicon carbide as a reinforcing fiber. 
     
     
         6 . A vapor deposition mask comprising:
 a mask body at which an aperture pattern is formed; and   a frame to which at least a part of a peripheral edge of the mask body is joined to hold the mask body at a certain state,   wherein at least a part of the frame comprises a quadrangular columnar-shaped body, the quadrangular columnar-shaped body comprising:   a plurality of unit structure bodies being stacked, each of the plurality of unit structure bodies having a sandwich structure comprising a core portion having a vacant space penetrating the core portion and end plates closing the vacant space at opposed end portions of the core portion,   wherein each of the plurality of unit structure bodies is stacked, via the end plates, in a direction through which the vacant space penetrates.   
     
     
         7 . A method of vapor deposition, the method comprising:
 arranging a substrate to be vapor deposited and the vapor deposition mask according to  claim 6  such that the substrate to be vapor deposited and the vapor deposition mask overlap each other; and,   depositing a vapor deposition material onto the substrate to be vapor deposited by flying away the vapor deposition material from a vapor deposition source arranged at a distance from the vapor deposition mask.   
     
     
         8 . The method of vapor deposition according to  claim 7 , wherein the frame of the vapor deposition mask has a rectangular shape and the vapor deposition mask is positioned in an upright position such that the quadrangular columnar-shaped body intersects a horizontal plane. 
     
     
         9 . A method for manufacturing an organic EL display apparatus, the method comprising:
 forming at least a TFT and a first electrode on a supporting substrate;   vapor depositing an organic material above the supporting substrate using the method of vapor deposition according to  claim 7  to form an organic deposition layer; and   forming a second electrode on the organic deposition layer.