Movable body apparatus, moving method, exposure apparatus, exposure method, flat-panel display manufacturing method, and device manufacturing method

Abstract

A movable body apparatus is provided with: a substrate holder which holds a substrate and which can move in the X- and Y-axis directions; a Y coarse movement stage which can move in the Y-axis direction; a first measurement system which acquires position information on substrate holder by means of heads provided on substrate holder and a scale provided on Y coarse movement stage; a second measurement system which acquires position information on Y coarse movement stage by means of heads provided on Y coarse movement stage and a scale; and a control system which controls the position of substrate holder based on position information acquired by first and second measurement systems. The first measurement system irradiates a measurement beam while moving heads in X-axis direction with respect to the scale, and second measurement system irradiates a measurement beam while moving heads in Y-axis direction with respect to the scale.

1 . A movable body apparatus comprising:
 a first movable body that holds an object and can move in a first direction and a second direction intersecting with each other;   a second movable body that can move in the second direction;   a reference member that serves as a reference on movement of the first movable body in the first direction and the second direction;   a first measurement system that acquires position information on the first movable body with respect to the reference member with a plurality of first heads and a first grating member, the plurality of first heads being provided at one of the first movable body and the second movable body and the first grating member being provided at the other of the first movable body and the second movable body, the first grating member having measurement components in the first direction and the second direction that allow measurement of a moving range in the first direction of the first movable body by a plurality of grating areas arranged separately from one another in the first direction;   a second measurement system that acquires position information on the second movable body with respect to the reference member with a second head and a second grating member, the second head being provided at one of the second movable body and the reference member, the second grating member being provided at the other of the second movable body and the reference member, and the second grating member having measurement components in the first direction and the second direction that allow measurement of a moving range in the second direction of the second movable body; and   a control system that controls a position of the first movable body in the first direction and the second direction with respect to the reference member, based on measurement information on at least three heads irradiating at least one of the plurality of grating areas with measurement beams, of the plurality of first heads, and the position information acquired by the second measurement system, wherein   the first measurement system acquires the position information on the first movable body by irradiating the first grating member with a measurement beam while the first head is moved in the first direction with respect to the first grating member,   the second measurement system acquires the position information on the second movable body by irradiating the second grating member with a measurement beam while the second head is moved in the second direction with respect to the second grating member,   during movement of the first movable body in the first direction, the measurement beam of each of the plurality of first heads moves off from one grating area of the plurality of grating areas and switches to another grating area adjacent to the one grating area, and   the control system acquires correction information to control movement of the first movable body using another head of the plurality of first heads based on measurement information on the at least three heads, or position information on the first movable body measured using the at least three heads, the another head being different from the at least three heads, and the measurement beam of the another head that has moved off from the one grating area switching to the another grating area.