Segmented print bar for large-area ovjp deposition

Abstract

OVJP print bars are provided that include multiple print head segments, each of which includes a print head and which can be positioned relative to the substrate independently of each other print head segment. Accordingly, a more consistent head-to-substrate distance can be maintained even for substrates that are not uniformly planar.

1 . An organic vapor jet printing (OVJP) deposition system containing one or more print bars, each print bar of the plurality of print bars comprising:
 a plurality of print head segments, each of the plurality of print head segments comprising an OVJP print head;   a plurality of fly height distance sensors, each of the plurality of fly height distance sensors configured to measure a distance between a substrate disposed below the print bar and a portion of at least one of the print head segments; and   a plurality of actuators configured to adjust a position and/or orientation of one or more of the plurality of print head segments based upon one or more distances between the substrate and the print bar measured by one or more of the plurality of fly height distance sensors.   
     
     
         2 . The OVJP deposition system of  claim 1 , further comprising:
 one or more gas distribution channels connecting each print head segment to one or more organic vapor source cells located remotely from the print head segment.   
     
     
         3 . The OVJP deposition system of  claim 1 , wherein the print head segments of each print bar are in fluid communication with an individual organic vapor source. 
     
     
         4 . The OVJP deposition system of  claim 1 , wherein print head segments of multiple print bars are in fluid communication with a common organic vapor source. 
     
     
         5 . The OVJP deposition system of  claim 1 , wherein the plurality of print head segments of at least one print bar of the plurality of print bars are arranged in two rows in a direction essentially perpendicular to a direction of motion of the at least one print bar relative to the substrate when the print bar is operated to deposit material on the substrate. 
     
     
         6 . The OVJP deposition system of  claim 1 , wherein the plurality of print head segments of the at least one print bar are disposed within the rows such that print areas of each row of corresponding OVJP print heads form a single printed column on the substrate when the print bar is operated to deposit material on the substrate. 
     
     
         7 . The OVJP deposition system of  claim 1 , wherein each OVJP print head comprises an OVJP deposition nozzle in fluid communication with a carrier gas source and an organic material vapor source. 
     
     
         8 . The OVJP deposition system of  claim 7 , wherein the carrier gas source and the organic material vapor source are common to the plurality of print head segments of multiple print bars of the plurality of print bars. 
     
     
         9 . The OVJP deposition system of  claim 1 , wherein each actuator of the plurality of actuators is connected to, and configured to control the position and/or orientation of, at least two of the plurality of print head segments. 
     
     
         10 . The OVJP deposition system of  claim 9 , wherein each of the plurality of actuators controls the position and/or orientation of the at least two of the plurality of print head segments based upon distance measurements obtained by two or more of the plurality of fly height sensors. 
     
     
         11 . The OVJP deposition system of  claim 9 , wherein each of the plurality of actuators controls the position and/or orientation of the at least two of the plurality of print head segments based upon a distance measurement obtained by at least one of the at least one fly height sensor. 
     
     
         12 . The OVJP deposition system of  claim 1 , wherein, in each print bar of the plurality of print bars, each print head segment of the plurality of print head segments is movable independently of each other print head segment of the plurality of print head segments. 
     
     
         13 . The OVJP deposition system of  claim 12 , wherein each print head segment is movable at least in a direction essentially normal to the substrate independently of each other print head segment such that the distance from the each print head segment to the substrate is adjustable independently of the distance from each other print head segment to the substrate. 
     
     
         14 . The OVJP deposition system of  claim 1 , further comprising one or more vacuum channels arranged to remove material from a region between one or more of the plurality of print bars and the respective substrate when each print bar is operated to deposit material on the substrate. 
     
     
         15 . The OVJP deposition system of  claim 1 , further comprising a cold plate disposed adjacent to a plurality of the print head segments of at least one print bar of the plurality of print bars. 
     
     
         16 . A method of fabricating a device using organic vapor jet (OVJP) deposition, the method comprising:
 operating a plurality of print head segments to deposit material on a substrate, each of the plurality of print head segments comprising an OVJP print head;   receiving distance measurements from each of a plurality of fly height distance sensors, each of the plurality of fly height distance sensors configured to measure a distance between a substrate disposed below the print bar and a portion of at least one of the print head segments; and   actuating one or more actuators of a plurality of actuators to adjust a position and/or orientation of one or more of the plurality of print head segments based upon one or more of the distance measurements.   
     
     
         17 . The method of  claim 16 , wherein the plurality of print head segments are arranged in two rows in a direction essentially perpendicular to a direction of motion of the print bar relative to the substrate when the print bar is operated to deposit material on the substrate, the method further comprising moving the substrate relative to the plurality of print head segments, the plurality of print head segments relative to the substrate, or a combination thereof, in the direction of motion. 
     
     
         18 . The method of  claim 17 , wherein the plurality of print head segments are disposed within the rows such that print areas of each row of corresponding OVJP print heads form a single printed column on the substrate when the print bar is operated to deposit material on the substrate. 
     
     
         19 . The method of  claim 17 , wherein each actuator of the plurality of actuators is connected to, and configured to control the position and/or orientation of, at least two of the plurality of print head segments. 
     
     
         20 . The method of  claim 19 , further comprising actuating at least one of the plurality of actuators to control the position and/or orientation of the at least two of the plurality of print head segments based upon distance measurements obtained by two or more of the plurality of fly height sensors. 
     
     
         21 - 23 . (canceled)