Method of selectively forming cobalt metal layer by using cobalt compound, and method of fabricating semiconductor device by using cobalt compound

Abstract

A method of selectively forming a cobalt metal layer includes supplying a cobalt compound represented by Chemical Formula (1) onto a substrate that includes a wiring line of a late transition metal and an isolation film adjacent thereto, and supplying a reducing gas to selectively form a cobalt metal layer on the wiring line,

What is claimed is: 
     
         1 . A method of selectively forming a cobalt metal layer, the method comprising:
 supplying a cobalt compound represented by Chemical Formula (1) onto a substrate that includes a wiring line of a late transition metal and an isolation film adjacent thereto; and   supplying a reducing gas to selectively form a cobalt metal layer on the wiring line,   
       
         
           
           
               
               
           
         
         wherein, in the above Chemical Formula (1), L is a group represented by one of Chemical Formulae (2) to (4), and R 1  and R 2  are each independently a C1 to C8 linear or branched alkyl group, in which there is no substitution or a hydrogen atom is substituted with a halogen atom, 
       
       
         
           
           
               
               
           
         
         wherein, in the above Chemical Formula (2), R 3 , R 4 , R 5 , R 6 , and R 7  are each independently hydrogen or a C1 to C8 linear or branched alkyl group, and n is an integer of 1 to 3, 
       
       
         
           
           
               
               
           
         
         wherein, in the above Chemical Formula (3), R 8  and R 9  are each independently a C1 to C8 linear or branched alkyl group, 
       
       
         
           
           
               
               
           
         
         wherein, in the above Chemical Formula (4), R 10  and R 11  are each independently a C1 to C8 linear or branched alkyl group and R 12  is hydrogen or a C1 to C8 linear or branched alkyl group. 
       
     
     
         2 . The method as claimed in  claim 1 , wherein the late transition metal is one or more selected from the group of copper (Cu), cobalt (Co), platinum (Pt), palladium (Pd), rhodium (Rh), iridium (Ir), silver (Ag), gold (Au), ruthenium (Ru), and alloys thereof. 
     
     
         3 . The method as claimed in  claim 1 , wherein a temperature of the substrate is about 80° C. to about 500° C. 
     
     
         4 . The method as claimed in  claim 1 , wherein the wiring line is on a layer that includes one or more of a silicon nitride film, a silicon oxide film, a copper oxide film, a titanium nitride film, a titanium oxide film, a tantalum nitride film, a tantalum oxide film, a ruthenium oxide film, a zirconium oxide film, a hafnium oxide film, or a lanthanum oxide film. 
     
     
         5 . The method as claimed in  claim 1 , wherein the cobalt metal layer includes carbon in an amount of about 3 wt % or less. 
     
     
         6 . The method as claimed in  claim 1 , wherein a selectivity of the cobalt metal layer with respect to formation on the wiring line versus the isolation film is 60:1 or more. 
     
     
         7 . The method as claimed in  claim 6 , wherein the cobalt metal layer is not substantially formed on the isolation film. 
     
     
         8 . The method as claimed in  claim 1 , wherein, in Chemical Formula (1), R 1  and R 2  are each independently a methyl group, a monofluoromethyl group, a difluoromethyl group, a trifluoromethyl group, an ethyl group, a monofluoroethyl group, a difluoroethyl group, a trifluoroethyl group, or a tetrafluoroethyl group. 
     
     
         9 . The method as claimed in  claim 1 , wherein:
 L is a group represented by Chemical Formula (2), and   in Chemical Formula (2), n is 1, each of R 3 , R 4 , R 5 , and R 6  is a methyl group, and R 7  is a C2 to C8 linear or branched alkyl group.   
     
     
         10 . The method as claimed in  claim 1 , wherein:
 L is a group represented by Chemical Formula (2), and   in Chemical Formula (2), n is 2 and R 7  is hydrogen.   
     
     
         11 . The method as claimed in  claim 1 , wherein:
 L is a group represented by Chemical Formula (3), and   in Chemical Formula (3), each of R 8  and R 9  is an n-butyl group.   
     
     
         12 . The method as claimed in  claim 1 , wherein the supplying of the cobalt compound at least partially overlaps the supplying of the reducing gas in terms of time. 
     
     
         13 . The method as claimed in  claim 1 , wherein:
 the supplying of the cobalt compound and the supplying of the reducing gas are sequentially performed in this stated order, and   the method further comprises, between the supplying of the cobalt compound and the supplying of the reducing gas, purging a space over the substrate.   
     
     
         14 . A method of fabricating a semiconductor device, the method comprising:
 providing a substrate that includes a wiring line of a late transition metal and an isolation film adjacent thereto;   supplying a cobalt compound represented by Chemical Formula (1) onto the substrate;   supplying a reducing gas to selectively form a cobalt metal layer on the wiring line; and   forming an insulating layer on the cobalt metal layer,   
       
         
           
           
               
               
           
         
         wherein, in the above Chemical Formula (1), L is a group represented by one of Chemical Formulae (2) to (4), and R 1  and R 2  are each independently a C1 to C8 linear or branched alkyl group, in which there is no substitution or a hydrogen atom is substituted with a halogen atom, 
       
       
         
           
           
               
               
           
         
         wherein, in the above Chemical Formula (2), R 3 , R 4 , R 5 , R 6 , and R 7  are each independently hydrogen or a C1 to C8 linear or branched alkyl group, and n is an integer of 1 to 3, 
       
       
         
           
           
               
               
           
         
         wherein, in the above Chemical Formula (3), R 8  and R 9  are each independently a C1 to C8 linear or branched alkyl group, 
       
       
         
           
           
               
               
           
         
         wherein, in the above Chemical Formula (4), R 10  and R 11  are each independently a C1 to C8 linear or branched alkyl group and R 12  is hydrogen or a C1 to C8 linear or branched alkyl group. 
       
     
     
         15 . The method as claimed in  claim 14 , wherein the cobalt metal layer is an electrical conductor. 
     
     
         16 . The method as claimed in  claim 14 , wherein, in Chemical Formula (1), R 1  and R 2  are each independently a methyl group, a monofluoromethyl group, a difluoromethyl group, a trifluoromethyl group, an ethyl group, a monofluoroethyl group, a difluoroethyl group, a trifluoroethyl group, or a tetrafluoroethyl group. 
     
     
         17 . The method as claimed in  claim 14 , wherein:
 L is a group represented by Chemical Formula (2), and   in Chemical Formula (2), n is 1, each of R 3 , R 4 , R 5 , and R 6  is a methyl group, and R 7  is a C2 to C8 linear or branched alkyl group.   
     
     
         18 . The method as claimed in  claim 14 , wherein:
 L is a group represented by Chemical Formula (2), and   in Chemical Formula (2), n is 2 and R 7  is hydrogen.   
     
     
         19 . The method as claimed in  claim 14 , wherein:
 L is a group represented by Chemical Formula (3), and   in Chemical Formula (3), each of R 8  and R 9  is an n-butyl group.   
     
     
         20 . A method of selectively forming a cobalt metal layer, the method comprising:
 supplying a cobalt compound represented by Chemical Formula (1) onto a substrate that includes a copper wiring line and an isolation film adjacent thereto; and   supplying a reducing gas to selectively form a cobalt metal layer on the copper wiring line,   
       
         
           
           
               
               
           
         
         wherein, in the above Chemical Formula (1), L is a group represented by one of Chemical Formulae (2) to (4), and R 1  and R 2  are each independently a methyl group or a trifluoromethyl group, 
       
       
         
           
           
               
               
           
         
         wherein, in the above Chemical Formula (2), n is 1 or 2, 
         when n is 1: each of R 3 , R 4 , R 5 , and R 6  is a methyl group and R 7  is a C2 to C8 linear or branched alkyl group, and 
         when n is 2: each of R 3 , R 4 , R 5 , and R 6  is a C1 to C8 linear or branched alkyl group and R 7  is hydrogen, 
       
       
         
           
           
               
               
           
         
         wherein, in the above Chemical Formula (3), each of R 8  and R 9  is an n-butyl group, 
       
       
         
           
           
               
               
           
         
         wherein, in the above Chemical Formula (4), R 10  and R 11  are each independently a C1 to C8 linear or branched alkyl group, and R 12  is hydrogen or a C1 to C8 linear or branched alkyl group.