Exposure apparatus, exposure method, manufacturing method of flat-panel display, and device manufacturing method

Abstract

A substrate stage device of an exposure apparatus is equipped with: a noncontact holder that supports, in a noncontact manner, a first area and at least a partial area of a second area, of a substrate, the second area being arranged side by side with the first area in the Y-axis direction; a substrate carrier that holds the substrate held in a noncontact manner by the noncontact holder, at a position not overlapping the noncontact holder in the X-axis direction; Y linear actuators and Y voice coil motors that relatively move the substrate carrier with respect to the noncontact holder in the Y-axis direction; X voice coil motors that move the substrate carrier in the X-axis direction; and actuators that move the noncontact holder in the X-axis direction.

1 . An exposure apparatus that performs scanning exposure of each of a plurality of areas of an object, by irradiating the object with an illumination light via an optical system and relatively driving the object with respect to the illumination light, the apparatus comprising:
 a first support section that supports, in a noncontact manner, a first area and at least a partial area of a second area of the plurality of areas, the second area being arranged side by side with the first area in a first direction;   a holding section that holds the object supported in a noncontact manner by the first support section, at a position not overlapping the first support section in a second direction intersecting the first direction; and   a first drive section disposed spaced apart from the first support section in the second direction, the first drive section relatively driving the holding section that holds the object with respect to the first support section in the first direction so that an other area of the second area is supported by the first support section.