Nanopillar electrode devices and methods of recording action potentials

Abstract

This disclosure provide a nanopillar electrode device, comprising a substrate patterned with a plurality of metal pads. The device may further comprise a plurality of nanopillars electrode arrays, wherein each nanopillar electrode array is attached to the substrate above a metal pad and electrically connected to the pad. The device may further comprise and a chamber surrounding the nanopillar electrodes, which can be used for culturing cells of interest for recording action potentials. The nanopillar electrode device may be configured to apply a voltage through the nanopillar electrodes from a voltage source. Nanopillar electroporation may be used to increase the permeability of cell membranes to allow intracellular recording. Also provided are methods of device fabrication, and methods of use.

1 .- 20 . (canceled) 
     
     
         21 . A method comprising:
 placing a device in contact with cell membrane of a cell, the device comprising a plurality of conductive pads; and a plurality of nano-scale electrodes that are attached and electrically connected to the plurality of conductive pads; and   performing, by the device, electroporation of the cell to increase selective permeability of a portion of cell membrane interfacing with one or more nano-scale electrodes of the plurality of nano-scale electrodes to ions; and   recording, by the device, intracellular signals of the cell in response to the electroporation.   
     
     
         22 . The method of  claim 21 , wherein the electroporation is restricted to a region of the portion of cell membrane interfacing with the one or more nano-scale electrodes. 
     
     
         23 . The method of  claim 21 , wherein the intracellular signals indicate one or transmembrane potentials of the cell. 
     
     
         24 . The method of  claim 21 , wherein the cell is a neuron, a muscle cell, or an endocrine cell. 
     
     
         25 . The method of  claim 21 , wherein the device is capable of recording extracellular signals of the cell and the intracellular signals of the cell using the one or more nano-scale electrodes, respectively. 
     
     
         26 . The method of  claim 21 , wherein the cell is selected from the group consisting of a neuron, a muscle cell, and an endocrine cell. 
     
     
         27 . The method of  claim 21 , wherein the plurality of conductive pads are electrically insulated from each other, and the plurality of nano-scale electrodes comprise a biocompatible metal. 
     
     
         28 . The method of  claim 21 , wherein the electroporation is repeated for 20 pulses over a period of 1 second. 
     
     
         29 . The method of  claim 21 , wherein the plurality of conductive pads are electrically insulated by a Si3N4/SiO2 layer. 
     
     
         30 . The method of  claim 21 , wherein the plurality of conductive pads comprise a biocompatible metal. 
     
     
         31 . The method of  claim 30 , wherein the biocompatible metal comprises at least one of platinum, titanium, silver, or gold. 
     
     
         32 . The method of  claim 21 , wherein the device comprises one or more recording amplifiers, wherein each recording amplifier is electrically connected to a metal pad by an electrical lead. 
     
     
         33 . The method of  claim 21 , wherein the plurality of nano-scale electrodes are configured to switch between extracellular and intracellular recording by nano-scale electroporation via the plurality of nano-scale electrodes.