US2020400965A1PendingUtilityA1

Nano-Textured Attenuator for Use with Laser Beam Profiling and Laser Beam Characterization Systems and Method of Use

Assignee: MKS INSTR INCPriority: Jun 22, 2019Filed: Jun 19, 2020Published: Dec 24, 2020
Est. expiryJun 22, 2039(~12.9 yrs left)· nominal 20-yr term from priority
H01S 3/0014G02B 27/108G02B 26/023G01J 1/0414G01J 2001/0285G01J 1/0418G02B 27/281G01J 1/4257G02B 27/145
58
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Claims

Abstract

The present application discloses a nano-textured attenuator which includes a body defining in in the aperture, a measurement aperture, at least one beam dump aperture, at least one coupling fixture may be formed on or positioned on the body, a first nano-textured beamsplitter is positioned within the body and configured to transmit 85% to 99.9999% of an input signal therethrough while reflecting 0.0001% to form at least one partially attenuated signal, at least a second nano-textured beamsplitter is positioned within the body and is configured to transmit 85% to 99.9999% of an input signal therethrough while reflecting 0.0001% to form at least one attenuated measurement signal, and at least one camera is communication with the measurement aperture be configured to measure at least one optical characteristic of the attenuated measurement signal.

Claims

exact text as granted — not AI-modified
What is claimed: 
     
         1 . A nano-textured attenuator for use in laser beam characterization systems, comprising:
 a body defining at least one input aperture, at least one measurement aperture, and at least one beam dump aperture;   at least one coupling fixture positioned on the body, the coupling fixture positioned proximate to the at least one measurement aperture;   a first nano-textured beamsplitter positioned within the body, the first nano-textured beamsplitter configured to transmit 85% to 99.9999% of an input signal therethrough and reflect 15% to 0.0001% of the input signal to form at least one partially attenuated signal;   at least a second nano-textured beamsplitter positioned within the body, the second nano-textured beamsplitter configured to transmit 85% to 99.9999% of the partially attenuated signal therethrough and reflect 15% to 0.0001% of the partially attenuated signal to form at least one attenuated measurement signal; and   at least one camera system coupled to the body, the at least one camera system configured to receive the at least one attenuated measurement signal and measure at least one characteristics of the at least one attenuated measurement signal.   
     
     
         2 . The nano-textured attenuator of  claim 1  further comprising at least one attenuator/filter body configured to receive and retain at least one attenuator or optical filter therein, the at least one attenuator/filter body configured to be selectively positionable within the body between at least one input aperture and at least one measurement aperture. 
     
     
         3 . The nano-textured attenuator of  claim 2  further comprising:
 a first attenuator/filter body having at least a first filter coupled thereto, the first attenuator/filter body selectively positionable within an optical beam path of the at least one attenuated measurement signal; and 
 a second attenuator/filter body having at least a second filter coupled thereto, the second attenuator/filter body selectively positionable within an optical beam path of the at least one attenuated measurement signal. 
 
     
     
         4 . The nano-textured attenuator of  claim 1  further comprising at least one selectively movable mount configured to adjustably support at least one of the first nano-textured beamsplitter and the second nano-textured beamsplitter. 
     
     
         5 . The nano-textured attenuator of  claim 1  wherein at least one of the at least one input aperture, at least one measurement aperture, and at least one beam dump aperture includes protective window. 
     
     
         6 . A nano-textured attenuator for use in laser beam characterization systems, comprising:
 a body defining at least one input aperture, at least one measurement aperture, and at least one beam dump aperture;   at least one coupling fixture positioned on the body, the coupling fixture positioned proximate to the at least one measurement aperture;   a nano-textured beamsplitter positioned within the body, the nano-textured beamsplitter configured to transmit 85% to 99.9999% of an input signal therethrough and reflect 15% to 0.0001% of the input signal to form at least one partially attenuated signal;   at least one nano-textured optical element positioned within the body, the at least one nano-textured optical element configured to transmit 85% to 99.9999% of the partially attenuated signal therethrough and reflect 15% to 0.0001% of the partially attenuated signal to form at least one attenuated measurement signal; and   at least one camera system coupled to the body, the at least one camera system configured to receive the at least one attenuated measurement signal and measure at least one characteristics of the at least one attenuated measurement signal.   
     
     
         7 . The nano-textured attenuator of  claim 6  further comprising at least one attenuator/filter body configured to receive and retain at least one attenuator or optical filter therein, the at least one attenuator/filter body configured to be selectively positionable within the body between at least one input aperture and at least one measurement aperture. 
     
     
         8 . The nano-textured attenuator of  claim 7  further comprising:
 a first attenuator/filter body having at least a first filter coupled thereto, the first attenuator/filter body selectively positionable within an optical beam path of the at least one attenuated measurement signal; and 
 a second attenuator/filter body having at least a second filter coupled thereto, the second attenuator/filter body selectively positionable within an optical beam path of the at least one attenuated measurement signal. 
 
     
     
         9 . The nano-textured attenuator of  claim 6  further comprising at least one selectively movable mount configured to adjustably support at least one of the nano-textured beamsplitter and the at least one nano-textured optical element. 
     
     
         10 . The nano-textured attenuator of  claim 6  wherein at least one of the at least one input aperture, at least one measurement aperture, and at least one beam dump aperture includes protective window. 
     
     
         11 . A nano-textured attenuator for use in laser beam characterization systems, comprising:
 a body defining at least one input aperture, at least one measurement aperture, and at least one beam dump aperture;   at least one coupling fixture positioned on the body, the coupling fixture positioned proximate to the at least one measurement aperture;   a first nano-textured beamsplitter positioned within the body, the first nano-textured beamsplitter configured to transmit 85% to 99.9999% of an input signal therethrough and reflect 15% to 0.0001% of the input signal to form at least one partially attenuated signal;   at least a second nano-textured beamsplitter positioned within the body, the second nano-textured beamsplitter configured to transmit 85% to 99.9999% of the partially attenuated signal therethrough and reflect 15% to 0.0001% of the partially attenuated signal to form at least one attenuated measurement signal;   at least one camera system coupled to the body, the at least one camera system configured to receive the at least one attenuated measurement signal and measure at least one characteristics of the at least one attenuated measurement signal;   a first attenuator/filter body having at least a first filter coupled thereto, the first attenuator/filter body selectively positionable within an optical beam path of the at least one attenuated measurement signal; and   a second attenuator/filter body having at least a second filter coupled thereto, the second attenuator/filter body selectively positionable within an optical beam path of the at least one attenuated measurement signal.   
     
     
         12 . A method of measuring high laser power optical signal comprising:
 directing at least one input laser signal to a first nano-textured beamsplitter;   reflecting a portion of the input laser signal with the first nano-textured beamsplitter to form at least one partially attenuated signal, the at least one partially attenuated signal having 0.0001% to 15% of the power of the laser input signal while transmitting 85% to 99.9999% of the laser input signal through the first nano-textured beamsplitter;   reflecting a portion of the at least one partially attenuated signal from the first nano-textured beamsplitter with at least a second nano-textured beamsplitter to form at least one attenuated measurement signal, the at least one attenuated measurement signal having 0.0001% to 15% of the power of the at least one partially attenuated signal while transmitting 85% to 99.9999% of the laser input signal through the second nano-textured beamsplitter; and   measuring at least one optical characteristic of the at least one attenuated measurement signal with at least one sensor system.   
     
     
         13 . The method of  claim 12  further comprising selectively inserting at least one attenuator/filter body between at least one of the first nano-textured beamsplitter, the second nano-textured beamsplitter, and the at least one sensor system.

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