US2020399089A1PendingUtilityA1

Tape attaching method

Assignee: DISCO CORPPriority: Jun 18, 2019Filed: Jun 11, 2020Published: Dec 24, 2020
Est. expiryJun 18, 2039(~12.9 yrs left)· nominal 20-yr term from priority
Inventors:Kazuma Sekiya
H10P 54/00H10P 72/78H10P 72/0442B65H 37/04Y10T156/1057
47
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Claims

Abstract

A tape attaching method of attaching an adhesive tape to a workpiece includes a tape attaching step of attaching the adhesive tape to the workpiece in gas having a smaller molecular weight than an average molecular weight of the atmosphere, and a gas permeating step of causing the gas remaining between the workpiece and the adhesive tape to permeate the adhesive tape to thereby be removed, after the tape attaching step is carried out.

Claims

exact text as granted — not AI-modified
What is claimed is: 
     
         1 . A tape attaching method of attaching an adhesive tape to a workpiece, comprising:
 a tape attaching step of attaching the adhesive tape to the workpiece in gas having a smaller molecular weight than an average molecular weight of the atmosphere; and   a gas permeating step of causing the gas remaining between the workpiece and the adhesive tape to permeate the adhesive tape to thereby be removed, after the tape attaching step is carried out.   
     
     
         2 . The tape attaching method according to  claim 1 ,
 wherein, in the gas permeating step, the adhesive tape is heated.   
     
     
         3 . The tape attaching method according to  claim 1 ,
 wherein, in the gas permeating step, a pressure is applied to one of or both the workpiece and the adhesive tape in a direction in which the workpiece and the adhesive tape come in close contact with each other.   
     
     
         4 . The tape attaching method according to  claim 1 ,
 wherein the gas is helium.

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