Multiple-surface imposition vapor deposition mask

Abstract

A method for producing a multiple-surface imposition vapor deposition mask that enhances definition and reduces weight even when a size is increased. Each of multiple masks in an open space in a frame is configured by a metal mask having a slit, and a resin mask that is positioned on a front surface of the metal mask and has openings corresponding to a pattern to be produced by vapor deposition arranged by lengthwise and crosswise in a plurality of rows. In formation of the plurality of masks, after each of the metal masks and a resin film material for producing the resin mask are attached to the frame, the resin film material is processed, and the openings corresponding to the pattern to be produced by vapor deposition are formed in a plurality of rows lengthwise and crosswise, whereby the multiple-surface imposition vapor deposition mask of the above described configuration is produced.

1 . A multiple-surface imposition vapor deposition mask formed by arranging a plurality of masks in an open space in a frame, the plurality of masks comprising:
 a metal mask and a resin mask, wherein   the resin mask has openings,   the metal mask has through holes, and   the openings and the through holes are stacked.   
     
     
         2 . The multiple-surface imposition vapor deposition mask according to  claim 1 ,
 the metal mask is of a magnetic substance.   
     
     
         3 . The multiple-surface imposition vapor deposition mask according to  claim 1 ,
 wherein a sectional shape of the openings has broadening toward a vapor deposition source direction.   
     
     
         4 . The multiple-surface imposition vapor deposition mask according to  claim 1 ,
 wherein a thickness of the metal mask is 5 μm to 100 μm inclusive.   
     
     
         5 . The multiple-surface imposition vapor deposition mask according to  claim 1 ,
 wherein a thickness of the resin mask is 3 μm to 25 μm inclusive.