US2020395543A1PendingUtilityA1

Ink droplet volume measuring apparatus and ink droplet volume measuring method using the same, and thin film layer forming apparatus using the measuring apparatus, and manufacturing method of display apparatus using the thin film layer forming apparatus

Assignee: SAMSUNG DISPLAY CO LTDPriority: Jun 17, 2019Filed: Feb 18, 2020Published: Dec 17, 2020
Est. expiryJun 17, 2039(~12.9 yrs left)· nominal 20-yr term from priority
Inventors:Jeongwon Han
H10K 2102/331H10K 59/38H10K 71/70B05B 12/082H10K 71/00G01B 11/00G01B 11/24B41J 2/04593G01F 23/292G01B 11/28G01B 11/026B41J 2/0456G01B 2210/50G01B 11/0608B05B 13/00B05B 13/002B41J 2202/03B41J 2/04535H01L 51/502H01L 51/0005H01L 51/56H10K 71/50H10K 71/135H10K 50/115
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Claims

Abstract

An ink droplet volume measuring apparatus including: a substrate on which an ink droplet is dropped; a chromatic confocal sensor irradiating light having a plurality of wavelengths to the ink droplet dropped on the substrate and scanning the ink droplet; and a controller calculating a three-dimensional shape of the ink droplet from a signal scanned by the chromatic confocal sensor.

Claims

exact text as granted — not AI-modified
What is claimed is: 
     
         1 . An ink droplet volume measuring apparatus comprising:
 a substrate on which an ink droplet is dropped;   a chromatic confocal sensor configured to irradiate light having a plurality of wavelengths to the ink droplet dropped on the substrate and scan the ink droplet; and   a controller configured to calculate a three-dimensional shape of the ink droplet from a signal scanned by the chromatic confocal sensor.   
     
     
         2 . The ink droplet volume measuring apparatus of  claim 1 , wherein a plurality of the ink droplets are dropped on the substrate. 
     
     
         3 . The ink droplet volume measuring apparatus of  claim 1 , wherein:
 the chromatic confocal sensor is configured to scan the plurality of ink droplets; and   the controller is configured to calculate a three-dimensional shape for each of the plurality of droplets.   
     
     
         4 . The ink droplet volume measuring apparatus of  claim 1 , wherein the ink droplet comprises nanoparticles. 
     
     
         5 . The ink droplet volume measuring apparatus of  claim 4 , wherein the ink comprises ink for forming a quantum dot thin-film layer. 
     
     
         6 . A thin film layer forming apparatus comprising:
 an inkjet head comprising a nozzle for dropping an ink droplet;   a substrate on which the ink droplet is dropped;   a chromatic confocal sensor configured to irradiate light having a plurality of wavelengths to the ink droplet dropped on the substrate and scan the ink droplet; and   a controller configured to feedback-control an ejection amount of the nozzle of the inkjet head by calculating the three-dimensional shape of the ink droplet from a signal scanned by the chromatic confocal sensor.   
     
     
         7 . The thin film layer forming apparatus of  claim 6 , wherein a plurality of the nozzles are provided to drop a plurality of the ink droplets on the substrate. 
     
     
         8 . The thin film layer forming apparatus of  claim 7 , wherein:
 the chromatic confocal sensor is configured to scan the plurality of ink droplets; and   the controller is configured to calculate a three-dimensional shape for each of the plurality of ink droplets to feedback-control the ejection amount of each of the plurality of nozzles.   
     
     
         9 . The thin film layer forming apparatus of  claim 6 , wherein the ink droplet comprises nanoparticles. 
     
     
         10 . The thin film layer forming apparatus of  claim 9 , wherein the ink comprises ink for forming a quantum dot thin-film layer. 
     
     
         11 . A method of measuring a volume of an ink droplet, the method comprising:
 dropping an ink droplet on a substrate;   scanning and irradiating light having a plurality of wavelengths by a chromatic confocal sensor to the ink droplet dropped on the substrate; and   calculating a three-dimensional shape of the ink droplet from a signal scanned by the chromatic confocal sensor.   
     
     
         12 . The method of  claim 11 , wherein a plurality of the ink droplets are dropped onto the substrate. 
     
     
         13 . The method of  claim 12 , wherein the chromatic confocal sensor scans the plurality of ink droplets to obtain a three-dimensional shape for each of the plurality of ink droplets. 
     
     
         14 . The method of  claim 11 , wherein the ink droplet comprises nanoparticles. 
     
     
         15 . The method of  claim 14 , wherein the ink comprises ink for forming a quantum dot thin-film layer. 
     
     
         16 . A method of manufacturing a display apparatus, the method comprising:
 forming a plurality of emission devices on a first substrate;   forming a plurality of quantum dot thin-film layers on a second substrate; and   sealing the first substrate and the second substrate such that the plurality of emission devices and the plurality of quantum dot thin-film layers correspond to each other,   wherein the forming of the quantum dot thin-film layers comprises:
 dropping ink droplet for forming the quantum dot thin-film layer on a test substrate by using a nozzle of an inkjet head, 
 scanning and irradiating light having a plurality of wavelengths by a chromatic confocal sensor on the ink droplet dropped on the test substrate; 
 obtaining a three-dimensional shape of the ink droplet from a signal scanned by the chromatic confocal sensor to feedback-control an ejection amount of the nozzle; and 
 dropping the feedback-controlled ink droplet on the second substrate to be the quantum dot thin-film layer. 
   
     
     
         17 . The method of  claim 16 , wherein a plurality of the nozzles are provided to drop a plurality of ink droplets on the test substrate. 
     
     
         18 . The method of  claim 17 , wherein the chromatic confocal sensor scans the plurality of ink droplet to obtain a three-dimensional shape for each of the plurality of ink droplets and feedback-controls an ejection amount of each of the plurality of nozzles. 
     
     
         19 . The method of  claim 16 , wherein the ink droplet comprises nanoparticles. 
     
     
         20 . The method of  claim 16 , wherein the second substrate and the test substrate are respectively mounted on different stages.

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