Intermediate connecting member and inspection apparatus

Abstract

An intermediate connecting member according to one aspect of the present disclosure is provided between a first member including multiple first terminals and a second member including multiple second terminals. The intermediate connecting member includes multiple connection parts configured to electrically connect the first terminals to the second terminals, and a retainer holding the multiple connection parts. Each of the multiple connection parts is formed of an elastic member to which an electrically conductive property is given at least on a surface of the elastic member.

What is claimed is: 
     
         1 . An intermediate connecting member that is provided between a first member including a plurality of first terminals and a second member including a plurality of second terminals, the intermediate connecting member comprising:
 a plurality of connection parts each configured to electrically connect a first terminal of the first terminals to a corresponding second terminal of the second terminals, each of the plurality of connection parts being formed of an elastic member to which an electrically conductive property is given at least on a surface of the elastic member; and   a retainer that holds the plurality of connection parts.   
     
     
         2 . The intermediate connecting member according to  claim 1 , wherein each of the plurality of connection parts has a spherical shape. 
     
     
         3 . The intermediate connecting member according to  claim 1 , wherein each of the plurality of connection parts includes
 a magnetic core formed of a magnetic material;   an elastic layer covering the magnetic core, the elastic layer being formed of an elastic material; and   a conductive layer covering the elastic layer, the conductive layer being formed of a conductive material.   
     
     
         4 . The intermediate connecting member according to  claim 1 , wherein each of the plurality of connection parts includes
 a magnetic core formed of a magnetic material; and   an elastic conductive layer covering the magnetic core, the elastic conductive layer being formed of an elastic material containing conductive particles.   
     
     
         5 . The intermediate connecting member according to  claim 1 , wherein each of the plurality of connection parts includes
 an elastic magnetic layer formed of an elastic material containing magnetic particles; and   a conductive layer covering the elastic magnetic layer, the conductive layer being formed of a conductive material.   
     
     
         6 . The intermediate connecting member according to  claim 1 , wherein each of the plurality of connection parts is formed of an elastic material containing conductive magnetic particles. 
     
     
         7 . An inspection apparatus comprising:
 a tester configured to apply electrical signals to a plurality of devices formed on a substrate, to inspect electrical characteristics of the plurality of devices;   a probe card including probes configured to contact electrodes of the plurality of devices; and   an intermediate connecting member including
 a plurality of connection parts each configured to electrically connect a first terminal of terminals of the tester to a corresponding second terminal of terminals of the probe card, each of the plurality of connection parts being formed of an elastic member to which an electrically conductive property is given at least on a surface of the elastic member; and 
 a retainer that holds the plurality of connection parts. 
   
     
     
         8 . The inspection apparatus according to  claim 7 , wherein the probe card is configured to be transported integrally with the substrate, in a state in which the probes are in contact with the electrodes of the plurality of devices.