US2020378378A1PendingUtilityA1

Cryopump

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Assignee: SUMITOMO HEAVY INDUSTRIESPriority: Feb 21, 2018Filed: Aug 20, 2020Published: Dec 3, 2020
Est. expiryFeb 21, 2038(~11.6 yrs left)· nominal 20-yr term from priority
Inventors:Takahiro Yatsu
F04B 37/085F04B 37/08F04B 37/18F04B 53/16F05B 2210/12
40
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Claims

Abstract

A cryopump includes a cryopump housing and a water absorbing layer mounted on an outer side of the cryopump housing.

Claims

exact text as granted — not AI-modified
What is claimed is: 
     
         1 . A cryopump comprising:
 a cryopump housing; and   a water absorbing layer mounted on an outer side of the cryopump housing.   
     
     
         2 . The cryopump according to  claim 1 , further comprising:
 a heat insulating layer disposed between the cryopump housing and the water absorbing layer.   
     
     
         3 . The cryopump according to  claim 2 , further comprising:
 a water absorbing and heat insulating sheet having the water absorbing layer on an outer side thereof and having the heat insulating layer on an inner side thereof.   
     
     
         4 . The cryopump according to  claim 2 , wherein a thickness of the heat insulating layer is determined such that a temperature of the water absorbing layer is maintained at a temperature higher than 0° C. during regeneration of the cryopump.

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