Flexible oled device, method for manufacturing same, and support substrate

Abstract

According to a method for producing a flexible OLED device of the present disclosure, a multilayer stack (100) is provided, the multilayer stack including a base (10), a functional layer region (20) which includes a TFT layer and an OLED layer, a flexible film (30) provided between the base and the functional layer region and supporting the functional layer region, and a release layer (12) provided between the flexible film and the base and bound to the base. The release layer is irradiated with lift-off light (216) transmitted through the base, whereby the flexible film is delaminated from the release layer. The release layer is made of a polycrystalline of tantalum nitride.

1 . A supporting substrate of a flexible OLED device, comprising:
 a release layer which is made of a polycrystal of tantalum nitride; and   a base supporting the release layer, the base being made of a material which is capable of transmitting ultraviolet light.   
     
     
         2 . The supporting substrate of  claim 1 , wherein a molar fraction of nitrogen contained in the tantalum nitride is higher than a molar fraction of tantalum contained in the tantalum nitride. 
     
     
         3 . The supporting substrate of  claim 1 , wherein a surface of the release layer has an irregularity pattern. 
     
     
         4 . The supporting substrate of  claim 1 , further comprising a flexible film which covers the release layer. 
     
     
         5 . The supporting substrate of  claim 4 , wherein
 a rear surface of the flexible film has irregularities which are in accordance with the irregularity pattern at the surface of the release layer, and   the irregularities have such a shape and size that visible light is diffuse-reflected by the irregularities.