Slurry plasma spray of plasma resistant ceramic coating

Abstract

Disclosed herein are methods for producing an ultra-dense and ultra-smooth ceramic coating. A method includes feeding a slurry of ceramic particles into a plasma sprayer. The plasma sprayer generates a stream of particles directed toward the substrate, forming a ceramic coating on the substrate upon contact.

What is claimed is: 
     
         1 . A method of forming a plasma resistant ceramic coating on a component of a processing chamber, the method comprising:
 feeding a slurry into a plasma sprayer, wherein the slurry comprises:
 ceramic particles; and 
 a polymer dispersant to facilitate uniform distribution of the ceramic particles; and 
   generating, with the plasma sprayer, a stream of the ceramic particles directed toward the component, wherein the stream of the ceramic particles forms the plasma resistant ceramic coating on the component upon contact with the component, wherein a composition of the plasma resistant ceramic coating comprises 40 mol % to less than 100 mol % of Y 2 O 3 , greater than 0 mol % to 60 mol % of ZrO 2 , and greater than 0 mol % to 10 mol % of Al 2 O 3 , and wherein the ceramic particles of the slurry comprise compositions that result in the composition of the plasma resistant ceramic coating upon contact with the component.   
     
     
         2 . The method of  claim 1 , wherein the polymer dispersant comprises at least one of polyacrylic acid, ammonium polymethacrylate, an omega-3 fatty acid, or polyethylene glycol. 
     
     
         3 . The method of  claim 1 , wherein the component comprises a ceramic, the method further comprising:
 after forming the plasma resistant ceramic coating, heating the plasma resistant ceramic coating to a temperature of up to about 2000° C.;   heat treating the component and the plasma resistant ceramic coating at the temperature of up to about 2000° C. for a time duration up to about 12 hours; and   forming a transition layer between the plasma resistant ceramic coating and the component via the heat treating.   
     
     
         4 . The method of  claim 1 , wherein the component comprises an additional ceramic coating disposed thereon, wherein the plasma resistant ceramic coating is formed over the additional ceramic coating, and wherein the additional ceramic coating is configured to minimize lattice mismatch with the plasma resistant ceramic coating. 
     
     
         5 . The method of  claim 4 , wherein:
 a first porosity of the additional ceramic coating is greater than 0.8%, and a second porosity of the plasma resistant ceramic coating is less than or equal to 0.8%; and   a first surface roughness of the additional ceramic coating is greater than 100 μin, and a second surface roughness of the plasma resistant ceramic coating is less than or equal to 100 μin.   
     
     
         6 . The method of  claim 4 , further comprising:
 performing plasma spraying using a dry powder feedstock to deposit the additional ceramic coating on the component prior to deposition of the plasma resistant ceramic coating.   
     
     
         7 . The method of  claim 1 , wherein the stream of the ceramic particles is generated by evaporating a solvent from the slurry upon passing the slurry through the plasma sprayer, and wherein the solvent comprises at least one of ethanol, methanol, de-ionized water, or acetonitrile. 
     
     
         8 . The method of  claim 1 , wherein the component is selected from a group comprising a lid, a nozzle, a chuck, a showerhead, a liner kit, or a ring. 
     
     
         9 . A method of forming a plasma resistant ceramic coating on a component of a processing chamber, the method comprising:
 feeding a slurry comprising ceramic particles into a plasma sprayer; and   generating, with the plasma sprayer, a stream of the ceramic particles directed toward the component, wherein the stream of the ceramic particles forms the plasma resistant ceramic coating on the component upon contact with the component,   wherein a composition of the plasma resistant ceramic coating comprises 40 mol % to less than 100 mol % of Y 2 O 3 , greater than 0 mol % to 60 mol % of ZrO 2 , and greater than 0 mol % to 10 mol % of Al 2 O 3 ,   wherein the ceramic particles of the slurry comprise compositions that result in the composition of the plasma resistant ceramic coating upon contact with the component, and   wherein the component comprises an additional ceramic coating disposed thereon,   wherein the plasma resistant ceramic coating is formed over the additional ceramic coating, and wherein the additional ceramic coating is configured to minimize lattice mismatch with the plasma resistant ceramic coating,   wherein a first porosity of the additional ceramic coating is greater than 0.8%, and a second porosity of the plasma resistant ceramic coating is less than or equal to 0.8%, and   wherein a first surface roughness of the additional ceramic coating is greater than 100 μin, and a second surface roughness of the plasma resistant ceramic coating is less than or equal to 100 μin.   
     
     
         10 . The method of  claim 9 , wherein the plasma resistant ceramic coating is a crystalline coating, and wherein the additional ceramic coating is an amorphous coating. 
     
     
         11 . The method of  claim 9 , further comprising:
 performing plasma spraying using a dry powder feedstock to deposit the additional ceramic coating on the component prior to deposition of the plasma resistant ceramic coating.   
     
     
         12 . The method of  claim 9 , wherein the stream of the ceramic particles is generated by evaporating a solvent from the slurry upon passing the slurry through the plasma sprayer, and wherein the solvent comprises at least one of ethanol, methanol, de-ionized water, or acetonitrile. 
     
     
         13 . The method of  claim 9 , further comprising:
 after forming the plasma resistant ceramic coating, heating the plasma resistant ceramic coating to a temperature of up to about 2000° C.;   heat treating the component and the plasma resistant ceramic coating at the temperature of up to about 2000° C. for a time duration up to about 12 hours; and   forming a transition layer between the plasma resistant ceramic coating and the additional ceramic coating via the heat treating.   
     
     
         14 . The method of  claim 9 , wherein the component is selected from a group comprising a lid, a nozzle, a chuck, a showerhead, a liner kit, or a ring. 
     
     
         15 . A method of forming a plasma resistant ceramic coating on a component of a processing chamber, the method comprising:
 feeding a slurry comprising ceramic particles into a plasma sprayer; and   generating, with the plasma sprayer, a stream of the ceramic particles directed toward the component, wherein the stream of the ceramic particles forms the plasma resistant ceramic coating on the component upon contact with the component,   wherein a composition of the plasma resistant ceramic coating comprises 40 mol % to less than 100 mol % of Y 2 O 3 , greater than 0 mol % to 60 mol % of ZrO 2 , and greater than 0 mol % to 10 mol % of Al 2 O 3 ,   wherein the ceramic particles of the slurry comprise compositions that result in the composition of the plasma resistant ceramic coating upon contact with the component, and   after forming the plasma resistant ceramic coating, heating the plasma resistant ceramic coating to a temperature of up to about 2000° C.;   heat treating the component and the plasma resistant ceramic coating at the temperature of up to about 2000° C. for a time duration up to about 12 hours; and   forming a transition layer between the plasma resistant ceramic coating and the component or an additional ceramic coating disposed on the component via the heat treating.   
     
     
         16 . The method of  claim 15 , wherein the plasma resistant ceramic coating is a crystalline coating, and wherein the additional ceramic coating is an amorphous coating. 
     
     
         17 . The method of  claim 15 , further comprising:
 performing plasma spraying using a dry powder feedstock to deposit the additional ceramic coating on the component prior to deposition of the plasma resistant ceramic coating.   
     
     
         18 . The method of  claim 15 , wherein the stream of the ceramic particles is generated by evaporating a solvent from the slurry upon passing the slurry through the plasma sprayer, and wherein the solvent comprises at least one of ethanol, methanol, de-ionized water, or acetonitrile. 
     
     
         19 . The method of  claim 15 , wherein the slurry further comprises a polymer dispersant, and wherein the polymer dispersant comprises at least one of polyacrylic acid, ammonium polymethacrylate, an omega-3 fatty acid, or polyethylene glycol. 
     
     
         20 . The method of  claim 15 , wherein the component is selected from a group comprising a lid, a nozzle, a chuck, a showerhead, a liner kit, or a ring.