Fluid control device

Abstract

Provided is a fluid control device including: a body member that is a block-shaped one having inside a flow path through which fluid flows and has an installation surface on which respective equipment for controlling the fluid flowing through the flow path is installed and a side surface adjacent to the installation surface; a heater that heats the body member; a heater holding member that has a facing surface facing the installation surface of the body member and holds the heater along the side surface with the facing surface made to face the installation surface; and a pressing mechanism that presses the facing surface toward the installation surface.

1 . A fluid control device comprising:
 a body member that is a block-shaped one having inside a flow path through which fluid flows and has an installation surface on which respective equipment for controlling the fluid flowing through the flow path is installed and a side surface adjacent to the installation surface;   a heater that heats the body member;   a heater holding member that has a facing surface facing the installation surface of the body member and holds the heater along the side surface with the facing surface made to face the installation surface; and   a pressing mechanism that presses the facing surface toward the installation surface.   
     
     
         2 . The fluid control device according to  claim 1 , wherein
 the installation surface is one including a first contact part that contacts with the facing surface,   the facing surface is one including a second contact part that contacts with the first contact part, and   at least one of the first contact part and the second contact part is formed in a surface shape that is tilted with respect to a pressing direction of the pressing mechanism.   
     
     
         3 . The fluid control device according to  claim 2 , wherein
 the first contact part and the second contact part are ones constituting a slide mechanism that interposes between the installation surface and the facing surface, and   the slide mechanism is one that slides the heater holding member with respect to the body member with use of pressing by the pressing mechanism so that the heater moves toward the side surface.   
     
     
         4 . The fluid control device according to  claim 2 , wherein
 the first contact part and the second contact part are configured to make a surface contact with each other.   
     
     
         5 . The fluid control device according to  claim 1 , wherein
 the heater holding member is one comprising:   an attachment part having the facing surface; and   a heater holding part that extends from a facing surface side of the attachment part along the side surface, and   the heater is provided on at least one of one surface of the heater holding part and the other surface on a side opposite to the one surface, the one surface facing the side surface.   
     
     
         6 . The fluid control device according to  claim 5 , wherein
 the one surface of the heater holding member is tilted from the facing surface toward the side surface.   
     
     
         7 . The fluid control device according to  claim 5 , wherein
 the pressing mechanism is one comprising:   a screw hole provided in the installation surface;   a long hole that penetrates through the attachment part and extends in a direction away from the heater holding part; and   a screw member that is screwed to the screw hole through the long hole.   
     
     
         8 . A fluid control device comprising: a body member that is a block-shaped one having inside a flow path through which fluid flows and has an installation surface on which respective equipment for controlling the fluid flowing through the flow path is installed and paired side surfaces adjacent to the installation surface; heaters arranged along the respective side surfaces; and a holding mechanism that holds the heaters while bringing the heaters into close contact with the side surfaces, wherein
 the holding mechanism comprises:   paired heater holding plates that face corresponding ones of the side surfaces of the body member and hold the heaters with the side surfaces;   a locking structure that is provided to the body member and locks one end parts of the paired heater holding plates, the one end parts extending in a direction opposite to a direction in which the installation surface faces; and   a connecting mechanism that mutually connects the other end parts of the paired heater holding plates, the other end parts extending in the direction in which the installation surface faces, and   the heaters are configured to be held brought into close contact with the side surfaces by locking the one end parts of the paired heater holding plates to the locking structure and mutually connecting the other end parts by the connecting mechanism.   
     
     
         9 . A fluid control device comprising: a body member that is a block-shaped one having inside a flow path through which fluid flows and has an installation surface on which respective equipment for controlling the fluid flowing through the flow path is installed and paired side surfaces adjacent to the installation surface; heaters arranged along the side surfaces; and a holding mechanism that holds the heaters while bringing the heaters into close contact with the side surfaces, wherein
 the holding mechanism comprises:   heater holding plates that face the side surfaces of the body member and hold the heaters with the side surfaces;   a locking structure that is provided to the body member and locks one end parts of the heater holding plates, the one end parts extending in a direction opposite to a direction in which the installation surface faces; and   a connecting mechanism that connects the other end parts of the heater holding plates to the body member, the other end parts extending in the direction in which the installation surface faces, and   the heaters are configured to be held brought into close contact with the side surfaces by locking the one end parts of the paired heater holding plates to the locking structure and connecting the other end parts to the installation surface by the connecting mechanism.