Optical device for microscopic observation

Abstract

An optical device for microscopic observation 4 comprises: a cold stop 13 having openings 13d, 13e corresponding to a low-magnification microscope optical system 5 and being a stop member arranged in a vacuum vessel 12 to let the light from the sample S pass to the camera 3; a warm stop 10 having an opening 14 corresponding to a high-magnification microscope optical system 5 and being a stop member arranged outside the vacuum vessel 12 to let the light from the sample S pass toward the cold stop 13; and a support member 11 supporting the warm stop 10 so that the warm stop can be inserted to or removed from on the optical axis of the light from the sample S, wherein the warm stop 10 has a reflective surface 15 on the camera 3 side and wherein the opening 14 is smaller than the openings 13d, 13e.

1 - 13 . (canceled) 
     
     
         14 . A microscope system for imaging an image of an object, comprising:
 a detector arranged in a vessel and configured to detect light from the object;   a microscope optical system comprising:
 a first optical system having a lens of a first magnification; and 
 a second optical system having a lens of a second magnification which is higher than the first magnification; 
 a support member having a plurality of apertures including a second aperture having a size that matches the second optical system and being disposed independently from the microscope optical system outside the vessel; and 
   the vessel having a first aperture on an optical path,   wherein one of the first optical system or the second optical system is disposed to face the object, the second aperture is removed at a position proximate to a window on a side facing the object of the vessel on the optical path between the microscope optical system and the detector when the first optical system is disposed to face to the object, and the second aperture is inserted at the position on the optical path when the second optical system is disposed to face to the object.   
     
     
         15 . The microscope system according to  claim 14 , further comprising a driving mechanism for driving the second aperture and a control circuit for controlling the driving mechanism. 
     
     
         16 . The microscope system according to  claim 14 , wherein the second aperture is configured to be inserted or removed at a position corresponding to a pupil position of the second optical system. 
     
     
         17 . The microscope system according to  claim 14 , further comprising a third aperture disposed outside the vessel. 
     
     
         18 . The microscope system according to  claim 14 , wherein the detector is a camera configured to detect infrared light emitted from a sample. 
     
     
         19 . The microscope system according to  claim 14 , wherein the object is a semiconductor device. 
     
     
         20 . A microscope system for imaging an image of an object, comprising:
 a microscope optical system comprising a first optical system having a first magnification and a second optical system having a second magnification which is higher than the first magnification, and configured to enable a changeover so as to locate either of the first optical system and the second optical system to face to the object;   a detector arranged in a vacuum vessel and configured to detect light from the object;   a cold stop comprising a first opening corresponding to the first optical system and arranged in the vacuum vessel;   a warm stop comprising a second opening corresponding to the second optical system and a reflective surface provided on a cold stop side of the warm stop, and arranged outside the vacuum vessel; and   a support member supporting the warm stop so that the warm stop can be inserted onto or removed from an optical path of the light from the object,   wherein the warm stop is removed at a position proximate to a window on a side facing the object of the vacuum vessel on the optical path when the first optical system is located so as to face to the object and the warm stop is inserted at the position on the optical path when the second optical system is located so as to face to the object.   
     
     
         21 . A microscopic observation method for imaging an image of an object using a microscope system comprising a microscope optical system comprising a first optical system having a lens of a first magnification and a second optical system having a lens of a second magnification which is higher than the first magnification, support member having a plurality of apertures including a second aperture having a size matching the second optical system and being disposed independently from the microscope optical system outside a vessel corresponding to the second optical system, a detector arranged in the vessel, the vessel having a first aperture on an optical path between the microscope optical system and the detector, the method comprising:
 locating the first optical system to face to the object and removing the second aperture at a position proximate to a window on a side facing the object of the vessel on the optical path of a light from the object between the microscope optical system and the detector;   by the detector, imaging the light passing through the first optical system;   locating the second optical system to face to the object and inserting the second aperture at the position on the optical path; and   by the detector, imaging the light passing through the second optical system and the second aperture.   
     
     
         22 . The microscopic observation method according to  claim 21 , wherein the second aperture is inserted or removed at a position corresponding to a pupil position of the second optical system. 
     
     
         23 . The microscopic observation method according to  claim 21 , wherein the detector is a camera configured to detect infrared light emitted from a sample. 
     
     
         24 . The microscopic observation method according to  claim 21 , wherein the object is a semiconductor device. 
     
     
         25 . A microscopic observation method for imaging an image of an object using a microscope system comprising a microscope optical system comprising a first optical system having a first magnification and a second optical system having a second magnification which is higher than the first magnification, a cold stop comprising a first opening corresponding to the first optical system and arranged in a vacuum vessel, a warm stop comprising a second opening corresponding to the second optical system and a reflective surface provided on a cold stop side of the warm stop and arranged outside the vacuum vessel, and a detector arranged in the vacuum vessel, the method comprising:
 locating the first optical system so as to face to the object and removing the warm stop at a position proximate to a window on a side facing the object of the vacuum vessel on an optical path of the light from the object;   by the detector, imaging the light passing through the first optical system and the first opening of the cold stop;   locating the second optical system so as to face to the object and inserting the warm stop at the position on the optical path; and   by the detector, imaging the light passing through the second optical system, the second opening of the warm stop and the first opening of the cold stop.