Electro-optical device, method of manufacturing electro-optical device, and electronic apparatus

Abstract

An electro-optical device is configured by a laminated body of a second conductive layer and a reflective layer for a mirror. The second conductive layer includes a mirror support post facing a concave portion at a side opposite to a substrate, and a flat plate which extends from an end portion of the mirror support post and faces the substrate. The concave portion is filled with the resin. Surfaces of the flat plate and the resin configure a continuous plane. The reflective layer for a mirror is laminated on a surface of the resin at a side opposite to the substrate, and a surface of the flat plate of the second conductive layer at a side opposite to the substrate.

What is claimed is: 
     
         1 . An electro-optical device comprising:
 a substrate;   a torsion hinge disposed above the substrate;   a conductive layer disposed above the torsion hinge;   a support post which protrudes from the conductive layer to the torsion hinge; and   a reflective layer disposed on the conductive layer, wherein   A>B, wherein   A is a thickness of the conductive layer, and   B is a thickness of the reflective layer.   
     
     
         2 . The electro-optical device according to  claim 1 , wherein the support post is filled with a resin. 
     
     
         3 . The electro-optical device according to  claim 2 , wherein the resin is surrounded by the support post and the reflective layer. 
     
     
         4 . The electro-optical device according to  claim 2 , wherein the reflective layer contacts the resin. 
     
     
         5 . The electro-optical device according to  claim 1 , wherein the reflective layer is electrically connected to the torsion hinge through the conductive layer. 
     
     
         6 . A projection display device comprising the electro-optical device according to  claim 1 . 
     
     
         7 . An electro-optical device comprising:
 a substrate;   a torsion hinge disposed above the substrate;   a conductive layer disposed above the torsion hinge; and   a reflective layer disposed on the conductive layer, wherein   the conductive layer includes a support post and a flat plate,   the support post is formed continuously with the flat plate and protrude toward the torsion hinge and consist a base, and the base contacts the torsion hinge,   the reflective layer contacts to the flat plate, and   a height difference between a height from the base to a surface of the resin at a side opposite to the substrate and a height from the base to a surface of the conductive layer at a side opposite to the substrate in equal to 0.2 μm or less.   
     
     
         8 . The electro-optical device according to  claim 7 , wherein the support post is filled with a resin. 
     
     
         9 . The electro-optical device according to  claim 7 , wherein the resin is surrounded by the support post and the reflective layer. 
     
     
         10 . The electro-optical device according to  claim 7 , wherein the reflective layer contacts the resin. 
     
     
         11 . The electro-optical device according to  claim 7 , wherein the reflective layer is electrically connected to the torsion hinge through the conductive layer. 
     
     
         12 . The electro-optical device according to  claim 7 , wherein the reflective layer is same material with the conductive layer. 
     
     
         13 . The electro-optical device according to  claim 7 , wherein the reflective layer is made of aluminum. 
     
     
         14 . The electro-optical device according to  claim 7 , wherein the conductive layer is made of aluminum. 
     
     
         15 . A projection display device comprising the electro-optical device according to  claim 7 . 
     
     
         16 . An electro-optical device comprising:
 a substrate;   an electrode disposed on the substrate   a reflective layer disposed above the substrate;   a first layer disposed between the substrate and the reflective layer; and   a second layer disposed between the substrate and the first layer, wherein
 the first layer forms a base portion and a flat portion, 
 the base portion is attached to the second layer, 
 the flat portion is extended from the base portion via a post that is formed continuously with the base portion, and includes a surface opposite to the substrate, 
 whole of the surface is attached to the reflective layer, and 
 the reflective layer is electrically connected to the electrode through the first layer and the second layer. 
   
     
     
         17 . The electro-optical device according to  claim 16 , the base portion, the post and reflective layer consist a closed space which is filled with a resin, and the reflective layer directly contacts the resin. 
     
     
         18 . The electro-optical device according to  claim 15 , the resin is made from a single layer. 
     
     
         19 . The electro-optical device according to  claim 15 , wherein the reflective layer and the conductive layer are made of aluminum. 
     
     
         20 . A projection display device comprising the electro-optical device according to  claim 16 .