Devices for hydrogen production and methods of fabricating a hydrogen catalyst layer
Abstract
Disclosed herein are devices for hydrogen production and methods of fabricating hydrogen catalyst layers. The method may comprise forming on a substrate a first horizontal crystal and a first standing crystal that include each molybdenum oxide; forming a second horizontal crystal, a second standing crystal, and a preliminary layer on the second horizontal and standing crystals by supplying a sulfur gas onto the first horizontal crystal and the first standing crystal, the preliminary layer including molybdenum disulfide (MoS 2 ); and removing the second horizontal crystal and the second standing crystal.
Claims
exact text as granted — not AI-modifiedWhat is claimed is:
1 . A method of fabricating a hydrogen catalyst layer, the method comprising:
providing a substrate comprising a first horizontal crystal and a first standing crystal that each include molybdenum oxide; forming a second horizontal crystal, a second standing crystal, and a preliminary layer on the second horizontal and second standing crystals by supplying a sulfur gas onto the first horizontal crystal and the first standing crystal, the preliminary layer including molybdenum disulfide (MoS 2 ); and removing the second horizontal crystal and the second standing crystal.
2 . The method of claim 1 , wherein forming the second horizontal crystal and the second standing crystal includes reducing at least a portion of oxygen atoms in the first horizontal crystal and in the first standing crystal.
3 . The method of claim 1 , wherein the second horizontal crystal and the second standing crystal include molybdenum dioxide (MoO 2 ).
4 . The method of claim 1 , wherein the molybdenum oxide in the first horizontal crystal and the first standing crystal has a chemical formula of Mo a O b , wherein a and b are each independently an integer equal to or greater than 1, and a ratio of b/a is from 2 to 3.
5 . The method of claim 1 , wherein providing the substrate comprising the first horizontal crystal and the first standing crystal includes supplying the substrate with an inert gas and a molybdenum oxide gas.
6 . The method of claim 1 , wherein removing the second horizontal crystal and the second standing crystal includes spraying the substrate with an etchant that etches the second horizontal crystal and the second standing crystal.
7 . The method of claim 1 , wherein forming the second horizontal crystal and the second standing crystal includes increasing a temperature of the substrate.
8 . A method of fabricating a hydrogen catalyst layer, the method comprising:
forming on a substrate a first horizontal crystal and a first standing crystal that each include molybdenum dioxide (MoO 2 ); forming a preliminary layer on the first horizontal crystal and the first standing crystal; and removing the first horizontal crystal and the first standing crystal, wherein the preliminary layer includes molybdenum disulfide (MoS 2 ).
9 . The method of claim 8 , wherein the first horizontal crystal extends in a first direction that is parallel to a top surface of the substrate, and
the first standing crystal extends in a second direction that intersects the top surface of the substrate.
10 . The method of claim 8 , wherein forming the preliminary layer on the first horizontal crystal and the first standing crystal includes supplying a sulfur gas onto the substrate.
11 . The method of claim 8 , wherein forming on the substrate the first horizontal crystal and the first standing crystal includes:
forming on the substrate a second horizontal crystal and a second standing crystal; and reducing at least a portion of oxygen atoms in the second horizontal crystal and in the second standing crystal.
12 . The method of claim 8 , wherein removing the first horizontal crystal and the first standing crystal includes spraying the substrate with an etchant that etches the first horizontal crystal and the first standing crystal.
13 . The method of claim 8 , wherein removing the first horizontal crystal and the first standing crystal includes forming a standing structure,
wherein the standing structure includes: a first standing segment that extends in a direction intersecting a top surface of the substrate; a second standing segment that extends in the direction intersecting the top surface of the substrate; and a first void between the first standing segment and the second standing segment.
14 . The method of claim 13 , wherein the first standing segment and the second standing segment are parallel to each other.
15 . A device for hydrogen production, the device comprising:
a substrate; a horizontal structure that lies on the substrate and extends in a first direction that is parallel to a top surface of the substrate; and a first standing structure and a second standing structure that each extend in a direction that intersects the top surface of the substrate, wherein each of the first and second standing structures includes:
a first standing segment and a second standing segment that are parallel to each other; and
a first void between the first standing segment and the second standing segment,
wherein extending directions of the first and second standing structures cross each other.
16 . The device of claim 15 , wherein the horizontal structure, the first standing segment, and the second standing segment each include molybdenum disulfide (MoS 2 ).
17 . The device of claim 15 , wherein a thickness of each of the first and second standing segments is less than a shortest interval between the first standing segment and the second standing segment.
18 . The device of claim 15 , wherein the first standing segment includes a first inner sidewall facing the second standing segment,
the second standing segment includes a second inner sidewall facing the first standing segment, and the first void completely exposes the first and second inner sidewalls.
19 . The device of claim 15 , wherein the horizontal structure, the first standing segment, and the second standing segment each have a plate shape.
20 . The device of claim 15 , wherein a second void is provided between the first standing structure and the second standing structure.Join the waitlist — get patent alerts
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