Power supply system for a vacuum pump and vacuum pump

Abstract

A power supply system for vacuum pump comprising a power supply means to supply electrical energy to the vacuum pump for operation and energy storage means connected to the vacuum pump to store energy produced by the vacuum pump during ramp-down of the vacuum pump.

1 . A power supply system for a vacuum pump comprising:
 a power supply means to supply electrical energy to the vacuum pump for operation; and   an energy storage means connected to the power supply means or a motor controller to store energy transferred from the vacuum pump during ramp-down of the vacuum pump.   
     
     
         2 . The power supply system according to  claim 1 , characterized in that energy stored in the energy storage means is used during ramp-up of the vacuum pump. 
     
     
         3 . The power supply system according to  claim 1 , characterized in that the energy in the energy storage means is stored electrically, mechanically, chemically and/or thermally. 
     
     
         4 . The power supply system according to  claim 1 , characterized in that the energy storage means comprises a battery, a capacitor, a pressure vessel, a fuel cell or a flywheel. 
     
     
         5 . The power supply system according to  claim 1 , characterized in that the electrical energy provided to the vacuum pump is completely supplied by the energy storage means. 
     
     
         6 . A turbomolecular pump, comprising:
 a stator;   a rotating assembly rotated relatively to the stator by an electric motor, wherein the rotating assembly comprises at least one rotor element in order to convey a gas from a pump inlet towards a pump outlet;   a controller connected to the electric motor; and   a power supply system connected with the controller;   characterized by an energy storage means connected either to the power supply system or the controller to store energy transferred from the vacuum pump during ramp-down of the vacuum pump.   
     
     
         7 . A method for shutting-down a vacuum pump, wherein a power supply means is switched off and energy produced by the vacuum pump after switching of the power supply means is stored in energy storage means. 
     
     
         8 . The method of  claim 7  further comprising starting-up the vacuum pump, wherein the power supply means is switched on and electrical energy of the power supply means is combined with energy generated by the energy storage means. 
     
     
         9 . (canceled)