Movable body apparatus, exposure apparatus, manufacturing method of flat panel display, and device manufacturing method

Abstract

A substrate stage apparatus includes: a fine movement stage movable along the XY plane; an XY two-dimensional stage apparatus (an X beam and an X carriage) which guides the fine movement stage in a direction parallel to the XY plane; a plurality of weight-canceling devices movable in the direction parallel to the XY plane synchronously with the fine movement stage and also working together to support the weight of the fine movement stage; a first Y step guide provided at the +Y side of the X beam in a direction parallel to the Y-axis, that guides a part of the plurality of weight-canceling devices moving in a direction parallel to the X-axis; and a second Y step guide provided at the other side of the X beam in the direction parallel to the Y-axis, that guides the other part of the plurality of weight-canceling devices moving parallel to the X-axis.

1 . A movable body apparatus comprising:
 a movable body movable along a predetermined two-dimensional plane including a first axis and a second axis which are orthogonal to each other;   a guide device which guides the movable body in a direction parallel to the first axis and a direction parallel to the second axis;   a plurality of weight supporting devices, which are movable in a direction parallel to the two-dimensional plane synchronously with the movable body, that work together to support weight of the movable body;   a first guide member, which is provided at one side of the guide device in a direction parallel to the second axis, that guides some of the plurality of weight supporting devices moving in a direction parallel to the first axis; and   a second guide member, which is provided at the other side of the guide device in a direction parallel to the second axis, that guides another of the plurality of weight supporting devices moving in a direction parallel to the first axis.