Raman spectrum inspection apparatus and method of monitoring detection security of the same

Abstract

There are provided a Raman spectrum inspection apparatus (100a) and a method of monitoring detection security of the same. The Raman spectrum inspection apparatus (100a) includes: an optical device (20) configured to guide exciting light (11) to a sample (30) and collect a light signal from the sample (30); a spectrometer (40) configured to split the light signal collected by the optical device (20) so as to generate a Raman spectrum of the sample (30) which is detected; and a security monitor configured to monitor a security state of the sample (30) during irradiating of the exciting light (11) from the laser (10) onto the sample (30), and to provide a security indicating signal representing whether or not the sample (30) is damaged due to being irradiated by the exciting light (11).

1 . A Raman spectrum inspection apparatus, comprising:
 a laser configured to emit exciting light;   an optical device configured to guide the exciting light to a sample and collect a light signal from the sample;   a spectrometer configured to split the light signal collected by the optical device so as to generate a Raman spectrum of the sample which is detected; and   a security monitor configured to monitor a security state of the sample during irradiating of the exciting light from the laser onto the sample, and to provide a security indicating signal representing whether or not the sample is damaged due to being irradiated by the exciting light.   
     
     
         2 . The Raman spectrum inspection apparatus according to  claim 1 , wherein the security monitor comprises:
 a temperature sensor configured to sense a temperature or a variation of temperature of the detected sample during irradiating of the exciting light from the laser onto the sample.   
     
     
         3 . The Raman spectrum inspection apparatus according to  claim 2 , wherein the security monitor comprises a plurality of said temperature sensors positioned at different locations with respect to the sample for sensing the temperature or the variation of temperature of the sample. 
     
     
         4 . The Raman spectrum inspection apparatus according to  claim 3 , wherein the temperature sensor comprises a contact type temperature sensor configured to contact a predetermined position of the sample and to transmit temperature information of the sample in a wired way or wirelessly. 
     
     
         5 . The Raman spectrum inspection apparatus according to  claim 2 , wherein,
 the light signal comprises a Raman spectrum signal and an infrared signal,   the temperature sensor comprises an infrared thermometer,   the spectrometer and the infrared thermometer are arranged in a same detector, and   a portion of the detector is configured to detect the infrared signal from the sample during irradiating of the exciting light from the laser onto the sample, and another portion of the detector is configured to detect the Raman spectrum signal from the sample.   
     
     
         6 . The Raman spectrum inspection apparatus according to  claim 1 , wherein the Raman spectrum inspection apparatus further comprises a controller configured to send a control signal to the laser so as to reduce a power of the laser or to turn off the laser if the security indicating signal provided by the security monitor indicates that a security of the sample is affected by a detection performed to the sample. 
     
     
         7 . The Raman spectrum inspection apparatus according to  claim 2 , wherein the Raman spectrum inspection apparatus further comprises a controller configured to send a control signal to the laser so as to reduce a power of the laser or to turn off the laser if the temperature or variation of temperature of the sample sensed by the temperature sensor exceeds a threshold. 
     
     
         8 . The Raman spectrum inspection apparatus according to  claim 1 , wherein the security monitor is further configured to monitor a surface state of the sample during irradiating of the exciting light from the laser onto the sample, the surface state indicating whether or not the sample is damaged due to being irradiated by the exciting light. 
     
     
         9 . The Raman spectrum inspection apparatus according to  claim 8 , wherein the security monitor comprises an imaging device for capturing an image of a surface of the sample. 
     
     
         10 . The Raman spectrum inspection apparatus according to  claim 9 , wherein the optical device is configured to establish a Raman light signal collection light path for collecting the light signal from the sample, and
 an image capturing light path, which extends from the sample to the imaging device and is configured for capturing the image of the surface of the sample, is completely independent of the Raman light signal collection light path, or at least a portion of the image capturing light path is coaxial with the Raman light signal collection light path.   
     
     
         11 . The Raman spectrum inspection apparatus according to  claim 9 , further comprising:
 an image processor configured to process an image obtained by a camera so as to determine a change in gray scale of the image of the surface of the sample; and   a controller configured to send a control signal to the laser so as to reduce a power of the laser or to turn off the laser if the change in gray scale exceeds a threshold.   
     
     
         12 . The Raman spectrum inspection apparatus according to  claim 8 , wherein the security monitor comprises a smog detector configured to monitor whether or not a surface of the sample generates smog during irradiating of the exciting light from the laser onto the sample, and
 the Raman spectrum inspection apparatus further comprises a controller configured to send a control signal to the laser so as to reduce a power of the laser or to turn off the laser if it is monitored by the smog detector that the surface of the sample generates smog.   
     
     
         13 . A method of monitoring a detection security of a Raman spectrum inspection apparatus, comprising:
 emitting exciting light by a laser;   guiding the exciting light to a sample and collecting a light signal from the sample; and   monitoring a security state of the sample during irradiating of the exciting light from the laser onto the sample, and providing a security indicating signal representing whether or not the sample is damaged due to being irradiated by the exciting light.   
     
     
         14 . The method according to  claim 13 , further comprising:
 sending a control signal to the laser so as to reduce a power of the laser or to turn off the laser if the security indicating signal indicates that a security of the sample is affected by a detection performed to the sample.   
     
     
         15 . The method according to  claim 14 , wherein the monitoring a security state of the sample comprises:
 sensing a temperature or a variation of temperature of the detected sample during irradiating of the exciting light from the laser onto the sample; and   sending the control signal to the laser so as to reduce the power of the laser or to turn off the laser if the sensed temperature or variation of temperature of the sample exceeds a threshold.   
     
     
         16 . The method according to  claim 13 , wherein an infrared signal and a Raman spectrum signal from the sample are detected by different portions of a same detector. 
     
     
         17 . The method according to  claim 13 , wherein the step of monitoring a security state of the sample comprises:
 monitoring a surface state of the sample during irradiating of the exciting light from the laser onto the sample, the surface state indicating whether or not the sample is damaged due to being irradiated by the exciting light.   
     
     
         18 . The method according to  claim 17 , wherein the monitoring a surface state of the sample comprises obtaining an image of a surface of the sample. 
     
     
         19 . The method according to  claim 18 , further comprising:
 processing the obtained image so as to determine a change in gray scale of the image of the surface of the sample; and   sending a control signal to the laser so as to reduce a power of the laser or to turn off the laser if the change in gray scale exceeds a threshold.   
     
     
         20 . The method according to  claim 17 , wherein the monitoring a surface state of the sample comprises monitoring whether or not a surface of the sample generates smog during irradiating of the exciting light from the laser onto the sample; and
 the method further comprises sending a control signal to the laser so as to reduce a power of the laser or to turn off the laser if it is monitored that the surface of the sample generates smog.