Photomask layout, methods of forming fine patterns and method of manufacturing semiconductor devices

Abstract

A method of forming fine patterns including forming a plurality of first sacrificial patterns on a target layer, the target layer on a substrate, forming first spacers on respective sidewalls of the first sacrificial patterns, removing the first sacrificial patterns, forming a plurality of second sacrificial patterns, the second sacrificial patterns intersecting with the first spacers, each of the second sacrificial patterns including a line portion and a tab portion, and the tab portion having a width wider than the line portion, forming second spacers on respective sidewalls of the second sacrificial patterns, removing the second sacrificial patterns, and etching the target layer through hole regions, the hole regions defined by the first spacers and the second spacers, to expose the substrate may be provided.

What is claimed is: 
     
         1 . A method of forming fine patterns, the method comprising:
 forming a plurality of first sacrificial patterns on a target layer, the target layer on a substrate;   forming first spacers on respective sidewalls of the first sacrificial patterns;   removing the first sacrificial patterns;   forming a plurality of second sacrificial patterns, the second sacrificial patterns intersecting with the first spacers, each of the second sacrificial patterns including a line portion and a tab portion, and the tab portion having a width wider than the line portion;   forming second spacers on respective sidewalls of the second sacrificial patterns;   removing the second sacrificial patterns; and   etching the target layer through hole regions, the hole regions defined by the first spacers and the second spacers, to expose the substrate.