Mems lens actuator

Abstract

Disclosed embodiments include a MEMS lens system comprising a first lens holder comprising a first lens, an aperture layer comprising an aperture, a lens actuator system, and an image sensor.

1 . An apparatus comprising:
 a first substrate comprising a plurality of lens holders, each lens holder of the plurality of lens holders having a corresponding first lens connected thereto;   a second substrate comprising a plurality of apertures corresponding to the plurality of lens holders;   a third substrate comprising a plurality of lens connection areas corresponding to the plurality of apertures, each lens connection area of the plurality of lens connection areas having a corresponding second lens connected thereto; and   wherein the first, second, and third substrate are coupled together such that each aperture of the plurality of apertures aligns with, and is disposed between, the corresponding first lens and the corresponding second lens.   
     
     
         2 . The apparatus of  claim 1 , wherein the corresponding second lens is connected to the lens connection area via a first actuator. 
     
     
         3 . The apparatus of  claim 2 , wherein the first actuator comprises a thermal actuator. 
     
     
         4 . The apparatus of  claim 2 , wherein the first actuator encompasses the second lens when viewed from above. 
     
     
         5 . The apparatus of  claim 4 , wherein the first actuator comprises a plurality of interconnected concentric rings that are co-planar when the first actuator is in a resting state. 
     
     
         6 . The apparatus of  claim 5 , wherein the first actuator further comprises a plurality of legs that vertically displace the plurality of interconnected concentric rings from the lens connection area and provide a first set of contact points for applying a voltage to the first actuator. 
     
     
         7 . The apparatus of  claim 6 , wherein applying a voltage to the first set of contact points causes vertical displacement of an inner ring of the plurality of interconnected concentric rings of the first actuator relative to an outer ring of the plurality of interconnected concentric rings of the first actuator. 
     
     
         8 . The apparatus of  claim 7 , wherein the corresponding second lens is connected to a second actuator. 
     
     
         9 . The apparatus of  claim 8 , wherein the second actuator is also connected to the second substrate. 
     
     
         10 . The apparatus of  claim 9 , wherein the second actuator comprises a ring-shaped layer that encompasses the second lens. 
     
     
         11 . The apparatus of  claim 10 , wherein the second actuator is a thermal actuator. 
     
     
         12 . The apparatus of  claim 10 , wherein the second actuator comprises a plurality of interconnected concentric rings that are co-planar when the second actuator is in a resting state. 
     
     
         13 . The apparatus of  claim 12 , wherein the second actuator further comprises a plurality of legs that vertically displace the plurality of interconnected concentric rings from the second substrate and provide a second set of contact points for applying a voltage to the second actuator. 
     
     
         14 . The apparatus of  claim 13 , wherein applying a voltage to the second set of contact points causes vertical displacement of an inner ring of the plurality of interconnected concentric rings of the second actuator relative to an outer ring of the plurality of interconnected concentric rings of the second actuator. 
     
     
         15 . An apparatus comprising:
 a substrate comprising a lens connection area having a lens connected thereto;   wherein the lens is connected to the lens connection area via an actuator;   wherein the actuator comprises a plurality of interconnected concentric rings that are co-planar when the actuator is in a resting state;   wherein the actuator further comprises a plurality of legs that vertically displace the plurality of interconnected concentric rings from the lens connection area and provide a set of contact points for applying a voltage to the actuator; and   wherein applying a voltage to the set of contact points causes vertical displacement of an inner ring of the plurality of interconnected concentric rings relative to an outer ring of the plurality of interconnected concentric rings.