Offset rejection electrodes

Abstract

A MEMS sensor that comprises a sensing reference plane, at least one anchor coupled to the sensing reference plane, wherein the sensing reference plane is divided by a first and a second axis forming four quadrants on the sensing reference plane, at least one proof mass coupled to the at least one anchor, wherein one of the at least one proof mass moves under an external excitation, and a pattern of sensing elements on the sensing reference plane to detect motion normal of the at least one proof mass relative to the sensing reference plane, wherein the pattern of sensing elements comprises at least three sensing elements in each of the four quadrants.

What is claimed is: 
     
         1 . A MEMS sensor, comprising:
 a sensing reference plane, wherein the sensing reference plane is divided by a first and a second axis forming four quadrants on the sensing reference plane;   at least one anchor coupled to the sensing reference plane;   at least one proof mass coupled to the at least one anchor, wherein one of the at least one proof mass moves under an external excitation; and   a pattern of sensing elements on the sensing reference plane to detect motion of the at least one proof mass relative to the sensing reference plane, wherein the pattern of sensing elements comprises at least three sensing elements in each of the four quadrants.