Manufacturing method of display device and thin-film deposition apparatus using the same

Abstract

A method of manufacturing a display device, including: providing a display element layer on a substrate; forming a thin film encapsulation layer covering the display element layer; aging the thin film encapsulation layer by using a light source emitting artificial sunlight; and forming a window on the aged thin film encapsulation layer.

What is claimed is: 
     
         1 . A thin film deposition apparatus comprising:
 a plurality of chambers,   wherein one of the plurality of chambers is an entry and exit chamber through which a substrate enters from outside of the thin film deposition apparatus, and at least one of the plurality of chambers is a process chamber, which is configured to deposit a thin film on the substrate; and   a light source coupled to a chamber of the plurality of chambers, and configured to irradiate artificial sunlight on a deposited thin film to age the deposited thin film.   
     
     
         2 . The thin film deposition apparatus of  claim 1 , wherein
 the light source is coupled to the entry and exit chamber.   
     
     
         3 . The thin film deposition apparatus of  claim 1 , wherein
 one of the plurality of the chambers is an aging chamber to which the light source is coupled, and which is configured to age the deposited thin film.   
     
     
         4 . The thin film deposition apparatus of  claim 1 , wherein
 the light source emits artificial sunlight comprising infrared light, visible light, and ultraviolet light.   
     
     
         5 . The thin film deposition apparatus of  claim 1 , wherein
 the process chamber is a plurality of process chambers.