Vaporization device and vaporization system

Abstract

In order to make it possible to accurately detect the liquid level of a liquid material in a container, a vaporization device is adapted to include: a container 10 that contains a liquid material X; a heater 30 that heats the liquid material X in the container 10; and a liquid level sensor 20 that detects the liquid level of the liquid material in the container 10, in which when viewing the inside of the container 10 from above, a vaporization region S1 in which the liquid material X is vaporized, and a liquid level stable region S2 different from the vaporization region S1 are configured to be formed, and the liquid level sensor 20 detects the liquid level of the liquid material X in the liquid level stable region S2.

1 . A vaporization device comprising:
 a container that contains a liquid material;   a heater that heats the liquid material in the container; and   a liquid level sensor that detects a liquid level of the liquid material in the container, wherein   when viewing an inside of the container from above, a vaporization region in which the liquid material is vaporized, and a liquid level stable region are formed, and   the liquid level sensor detects the liquid level of the liquid material in the liquid level stable region.   
     
     
         2 . The vaporization device according to  claim 1 , wherein
 the heater is provided to a side wall of the container on a vaporization region side or to a vicinity of it.   
     
     
         3 . The vaporization device according to  claim 1 , further comprising
 a separation member that separates between the vaporization region and the liquid level stable region so as to enable the liquid material to be circulated between these regions.   
     
     
         4 . The vaporization device according to  claim 3 , wherein
 the separation member separates between the vaporization region and the liquid level stable region so as to enable material gas resulting from vaporization of the liquid material to be circulated between these regions.   
     
     
         5 . The vaporization device according to  claim 1 , configured so that a calorific value given per unit volume per unit time is lower in the liquid level stable region than in the vaporization region. 
     
     
         6 . The vaporization device according to  claim 1 , comprising
 a heater that is provided in an upper part of the container and heats material gas resulting from vaporization of the liquid material.   
     
     
         7 . The vaporization device according to  claim 1 , wherein
 a lead-out port for leading material gas resulting from vaporization of the liquid material out of the container is provided on a vaporization region side of the container.   
     
     
         8 . The vaporization device according to  claim 1 , wherein
 an introduction port for introducing the liquid material into the container is formed on a liquid level stable region side of the container.   
     
     
         9 . A vaporization system comprising:
 the vaporization device according to  claim 1 ;   a liquid material supply device that supplies the liquid material to the vaporization device; and   a control device that controls a supply amount of the liquid material on a basis of a detection signal of the liquid level sensor.