Substrate housing structure

Abstract

A substrate housing structure includes a container, a cover, a bag, and a band. The container holds substrates therein. The over covers an opening of the container. The bag is disposed in a space between. the cover and a storing object including at least the substrates that are stacked. The bag is filled with flowable matter. The band is wrapped around the container and the cover.

1 . A substrate housing structure comprising:
 a container holding a plurality of substrates therein;   a cover covering an opening of the container;   a bag disposed in a space between the cover and a storing object including at least the plurality of the substrates that are stacked, the bag being filled with flowable matter; and   a band wrapped around the container and the cover.   
     
     
         2 . The substrate housing structure according to  claim 1 , wherein
 the storing object includes cushion sheets disposed between the substrates such that the substrates and the cushion sheets are alternately on top of each other, the cushion sheets being disposed to reduce contact between the substrate, and   the cushion sheets have a size larger than a plane size of the plurality of the substrates.   
     
     
         3 . The substrate housing structure according to  claim 2  wherein the size of the cushion sheets is about equal to a size of an inner bottom surface. 
     
     
         4 . The substrate housing structure according to  claim 1 , wherein the cover is smaller than the opening. 
     
     
         5 . The substrate housing structure according to  claim 1 , wherein the container includes a recess in an inner wall thereof in which the bag is inserted. 
     
     
         6 . The substrate housing structure according to  claim 1 , wherein the bag includes partitions that divides an internal space into a plurality of sections. 
     
     
         7 . The substrate housing structure according to  claim 6 , wherein the partitions are substantially perpendicular to an in-plane direction of the substrates. 
     
     
         8 . The substrate housing structure according to  claim 6 , wherein the partitions include communication holes so that the sections of the internal space adjacent to the bag communicate with each other. 
     
     
         9 . The substrate housing structure according to  claim 8 , wherein the communication holes are formed so that all the sections of the internal space of the bag divided by the partitions communicate with each other. 
     
     
         10 . The substrate housing structure according to  claim 1 , wherein the cover and the bag are bonded together. 
     
     
         11 . The substrate housing structure according to  claim 1 , wherein the container includes a groove in an outer wall thereof in which the band is fitted. 
     
     
         12 . The substrate housing structure according to  claim 1 , wherein the substrates include glass substrates.