Liquid supply system

Abstract

A liquid supply system that can prevent or reduce the occurrence of cavitation without an increase in the overall size of the apparatus. The liquid supply system includes a first pump chamber P1 formed by a space surrounding the outer circumference of a first bellows 141, a second pump chamber P2 formed by a space surrounding the outer circumference of a second bellows 142, a first check valve 160A provided in a fluid passage passing through the first pump chamber P1 to block backflow of fluid, and a second check valve 160B provided in a fluid passage passing through the second pump chamber P2 to block backflow of fluid. The first check valve 160A and the second check valve 160B are both provided in the container 130 and disposed on the side opposite to an actuator 110 that drives a shaft member 120, with respect to the shaft member 120.

1 . A liquid supply system comprising:
 a container having an inlet and an outlet for fluid;   a shaft member that moves vertically upward and downward in the container;   a first bellows and a second bellows disposed one above the other along the vertical direction in the container, each of which expands and contracts with upward and downward motion of the shaft member;   a first pump chamber formed in the container by a space surrounding the outer circumference of the first bellows;   a second pump chamber formed in the container by a space surrounding the outer circumference of the second bellows;   a first check valve provided in a fluid passage passing through the first pump chamber to block backflow of fluid; and   a second check valve provided in a fluid passage passing through the second pump chamber to block backflow of fluid,   wherein the first check valve and the second check valve are both provided in the container and disposed on the side opposite to an actuator that drives the shaft member, with respect to the shaft member.   
     
     
         2 . The liquid supply system according to  claim 1 , wherein the first check valve includes an annular first valve body that moves upward while receiving the pressure of fluid flowing in horizontal and radially outward directions away from the center axis of the shaft member to open the valve, and the second check valve includes an annular second valve body that moves upward while receiving the pressure of fluid flowing in horizontal and radially outward directions away from the center axis of the shaft member to open the valve. 
     
     
         3 . The liquid supply system according to  claim 1 , wherein the first check valve and the second check valve are both disposed in the container coaxially with the shaft member. 
     
     
         4 . The liquid supply system according to  claim 1 , wherein the diameter of the closing portion of the first valve and the diameter of the closing portion of the second valve are equal. 
     
     
         5 . The liquid supply system according to  claim 1 , wherein the fluid is a cryogenic liquid, the space between the container and the pump chambers is in a vacuum state, and the actuator is disposed in the atmosphere.