Liquid supply system

Abstract

A liquid supply system that can supply liquid efficiently with reduced time needed for precooling. The liquid supply system includes a first fluid channel through which cryogenic liquid flows from an inlet 130b to an outlet 130c via a first pump chamber P1 and a second fluid channel through which cryogenic liquid flows from the inlet 130b to the outlet 130c via a second pump chamber P2. The height of the location at which the direction of the first fluid channel changes from the vertically upward direction to the vertically downward direction and the location at which the direction of the second fluid channel changes from the vertically upward direction to the vertically downward direction are the same.

1 . A liquid supply system comprising:
 a container having an inlet and an outlet for cryogenic liquid and provided with a pump chamber inside it;   a shaft member that moves vertically upward and downward in the container;   a first bellows and a second bellows disposed one above the other along the vertical direction in the container, each of which expands and contracts with upward and downward motion of the shaft member;   a first pump chamber formed by a space surrounding the outer circumference of the first bellows;   a second pump chamber formed by a space surrounding the outer circumference of the second bellows;   a first fluid channel through which cryogenic liquid flows from the inlet to the outlet via the first pump chamber; and   a second fluid channel through which the cryogenic liquid flows from the inlet to the outlet via the second pump chamber,   wherein a height of a location at which the direction of the first fluid channel changes from the vertically upward direction to the vertically downward direction and a height of a location at which the direction of second fluid channel changes from the vertically upward direction to the vertically downward direction are the same.   
     
     
         2 . A liquid supply system according to  claim 1 , wherein the first pump chamber is formed by a space between a first valve that allows the cryogenic liquid entering through the inlet to flow into the interior of the container and a third valve that allows the cryogenic liquid to flow from the interior of the container to the outlet, the second pump chamber is formed by a space between a second valve that allows the cryogenic liquid entering through the inlet to flow into the interior of the container and a fourth valve that allows the cryogenic liquid to flow from the interior of the container to the outlet, and the third valve and the fourth valve are disposed in upper portions of the respective pump chambers.