Isolator for a substrate processing chamber

Abstract

A processing kit for a plasma processing chamber. The processing kit includes a plurality of ceramic arc-shaped pieces. Each arc-shaped piece has a concave first end and a convex second end and the first end of each arc-shaped piece is configured to mate with an adjacent end of a neighboring arc-shaped piece to form a ring shaped inner isolator.

1 - 20 . (canceled) 
     
     
         21 . A component for a ring shaped isolator for a plasma processing chamber, comprising:
 an arc-shaped piece of the isolator, the arc-shaped piece having a concave first end and a convex second end.   
     
     
         22 . The component of  claim 21 , wherein each end of the arc-shaped piece is configured to mate with a corresponding adjacent end of a corresponding neighboring ceramic arc-shaped piece to form the isolator. 
     
     
         23 . The component of  claim 21 , wherein the concave first end has a geometry configured to mate with a geometry of the convex second end. 
     
     
         24 . The component of  claim 21 , wherein the arc-shape piece having an arc of X degrees, wherein X equals 360 divided by N, wherein N is a whole number greater than 1. 
     
     
         25 . The component of  claim 21 , wherein the arc of the arc-shaped piece is 120 degrees. 
     
     
         26 . The component of  claim 21 , wherein the arc-shaped piece has an inner wall having a radius of about 7.499 inches to about 7.501 inches. 
     
     
         27 . The component of  claim 21 , wherein the arc-shaped piece has an outer wall having a radius of about 8.599 inches to about 8.601 inches. 
     
     
         28 . The component of  claim 21 , wherein the arc-shaped piece has a thickness of about 0.397 inches to about 0.403 inches. 
     
     
         29 . The component of  claim 21 , wherein the concave first end of the arc-shaped piece has a radius of about 0.550 inches. 
     
     
         30 . The component of  claim 21 , wherein the convex second end of the arc-shaped piece has a radius of about 0.550 inches. 
     
     
         31 . The component of  claim 21 , wherein the arc-shaped piece is fabricated from at least one of yttria (Y 2 O 3 ), aluminum nitride (AlN), and alumina (Al 2 O 3 ). 
     
     
         32 . The component of  claim 21 , wherein the arc-shaped piece is fabricated from at least 99% alumina (Al 2 O 3 ) by weight. 
     
     
         33 . The component of  claim 21 , wherein the arc-shaped piece is fabricated from ceramic.