Vapor deposition mask, vapor deposition apparatus, and method for producing display device

Abstract

A sheet portion and a first projection are included. The sheet portion has a sheet shape and includes one or more mask openings. The first projection is provided on a surface of the sheet portion the surface is configured to face a substrate, and the first projection has a frame shape and is formed along an edge of at least one of the one or more mask openings. With this configuration, thin films having dimensions conforming to the design dimensions and preventing blurring are formed over the substrate.

1 - 4 . (canceled) 
     
     
         5 . A vapor deposition mask configured to be positioned to face a substrate and configured to form a film over the substrate, the vapor deposition mask comprising:
 a sheet portion having a sheet shape and including a plurality of mask openings; and   a plurality of first projections first projection provided on a surface of the sheet portion, the surface being configured to face the substrate, each of the plurality of first projections having a frame shape along an edge of the at least one of the plurality of mask openings,   wherein   in the plurality of first projections, the heights of the plurality of first projections are greater towards the center part of the sheet portion from an outermost periphery of the sheet portion.   
     
     
         6 . A vapor deposition mask configured to be positioned to face a substrate and configured to form a film over the substrate, the vapor deposition mask comprising:
 a sheet portion having a sheet shape and including at least one mask opening;   a first projection formed on a surface of the sheet portion, the surface being configured to face the substrate, the first projection having a frame shape along an edge of at least one of the at least one mask opening; and   a second projection provided on the surface of the sheet portion, the surface being configured to face the substrate, the second projection being in a lattice to be spaced from the first projection.   
     
     
         7 . The vapor deposition mask according to  claim 6 ,
 wherein the second projection has a height smaller than a height of the first projection.   
     
     
         8 - 14 . (canceled) 
     
     
         15 . The vapor deposition mask according to  claim 5 , further comprising a second projection provided on the surface of the sheet portion, the surface being configured to face the substrate, the second projection being in a lattice to be spaced from the first projection. 
     
     
         16 . The vapor deposition mask according to  claim 15 ,
 wherein the second projection has a height lower than a height of the first projection.   
     
     
         17 . The vapor deposition mask according to  claim 5 ,
 wherein each of the plurality of first projections has the frame shape along an edge of each of the plurality of mask openings.   
     
     
         18 . The vapor deposition mask according to  claim 6 ,
 wherein a plurality of mask openings are provided in the sheet portion, and   the first projection has a frame shape along an edge of each of the plurality of mask openings.   
     
     
         19 . The vapor deposition mask according to  claim 5 ,
 wherein the plurality of first projections are not provided along an edge of at least a part of the plurality of mask openings located at an end of the sheet portion.   
     
     
         20 . The vapor deposition mask according to  claim 6 ,
 wherein a plurality of mask openings are provided in the sheet portion, and   the first projection is not formed along an edge of at least a part of the plurality of mask openings located at an end of the sheet portion.   
     
     
         21 . The vapor deposition mask according to  claim 19 ,
 wherein the plurality of mask openings in the sheet portion are arranged in a matrix,   the plurality of first projections are not provided at any of the plurality of mask openings arranged in a frame shape at an outermost periphery, and   the plurality of first projections are respectively provided to have the frame shape along edges of the plurality of mask openings, the plurality of mask openings being provided in a region surrounded by the plurality of mask openings arranged in the frame shape at the outermost periphery.   
     
     
         22 . The vapor deposition mask according to  claim 20 ,
 wherein the plurality of mask openings in the sheet portion are arranged in a matrix,   the plurality of first projections are not provided at any of the plurality of mask openings arranged in a frame shape at an outermost periphery, and   the plurality of first projections are respectively provided to have the frame shape along edges of the plurality of mask openings, the plurality of mask openings being provided in a region surrounded by the plurality of mask openings arranged in the frame shape at the outermost periphery.   
     
     
         23 . The vapor deposition mask according to  claim 5 ,
 further comprising a mask frame having a frame shape, and an edge of the sheet portion is secured to the mask frame.   
     
     
         24 . The vapor deposition mask according to  claim 6 ,
 further comprising a mask frame having a frame shape, and an edge of the sheet portion is secured to the mask frame.   
     
     
         25 . A vapor deposition apparatus comprising the vapor deposition mask according to  claim 5 . 
     
     
         26 . A vapor deposition apparatus comprising the vapor deposition mask according to  claim 6 . 
     
     
         27 . A method for producing a display device, the method comprising using a substrate comprising a film formed with the vapor deposition mask according to  claim 5 . 
     
     
         28 . A method for producing a display device, the method comprising using a substrate comprising a film formed with the vapor deposition mask according to  claim 6 .