Optical system

Abstract

The disclosure provides an optical system, having a first optical control loop, which is set up to regulate a position and/or spatial orientation of a first optical element relative to a first module sensor frame, and a first module control loop, which is set up to regulate a position and/or spatial orientation of the first module sensor frame relative to a base sensor frame. Related components and methods are also provided

1 . An optical system, wherein at least one of the following holds:
 i) the optical system comprises:
 a first optical control loop configured to regulate a position and/or spatial orientation of a first optical element relative to a first module sensor frame; and 
 a first module control loop configured to regulate a position and/or spatial orientation of the first module sensor frame relative to a base sensor frame; and 
   ii) the optical system comprises:
 a second optical control loop configured to regulate a position and/or spatial orientation of a second optical element relative to a second module sensor frame; and 
 a second module control loop configured to regulate a position and/or spatial orientation of the second module sensor frame relative to the base sensor frame. 
   
     
     
         2 . The optical system of  claim 1 , wherein at least one of the following holds:
 the first optical control loop comprises:
 a first sensor configured to capture the position and/or spatial orientation of the first optical element relative to the first module sensor frame; and 
 a first actuator configured to position and/or spatially orient the first optical element in dependence on the captured position and/or spatial orientation of the first optical element; and 
   the second optical control loop comprises:
 a second sensor configured to capture the position and/or spatial orientation of the second optical element relative to the second module sensor frame; and 
 a second actuator configured to position and/or spatially orient the second optical element in dependence on the captured position and/or spatial orientation of the second optical element. 
   
     
     
         3 . The optical system of  claim 2 , wherein at least one of the following holds:
 the first module control loop comprises:
 a third sensor configured to capture the position and/or spatial orientation of the first module sensor frame relative to the base sensor frame; and 
 a third actuator configured to position and/or spatially orient the first module sensor frame in dependence on the captured position and/or spatial orientation of the first module sensor frame; and 
   the second module control loop comprises:
 a fourth sensor configured to capture the position and/or spatial orientation of the second module sensor frame relative to the base sensor frame; and 
 a fourth actuator configured to position and/or spatially orient the second module sensor frame in dependence on the captured position and/or spatial orientation of the second module sensor frame. 
   
     
     
         4 . The optical system of  claim 3 , wherein at least one of the following holds:
 the first module control loop and the first optical control loop are configured to interact with each other so that the position and orientation of the first and second optical elements are regulatable in each case in all six degrees of freedom relative to the base sensor frame; and   the second module control loop and the second optical control loop are configured to interact with each other so that the position and orientation of the first and second optical elements are regulatable in each case in all six degrees of freedom relative to the base sensor frame.   
     
     
         5 . The optical system of  claim 4 , wherein at least one of the following holds:
 the third actuator supports the first module holding frame on a base holding frame, and the fourth actuator supports the second module holding frame on the base holding frame;   the first module comprises the first optical element, the first module sensor frame, the first sensor, the first module holding frame and the first actuator;   the second module comprises the second optical element, the second module sensor frame, the second sensor, the second module holding frame and the second actuator; and   the first and/or second modules is/are interchangeable between the base sensor frame and the base holding frame.   
     
     
         6 . The optical system of  claim 1 , wherein both i) and ii) hold. 
     
     
         7 .- 10 . (canceled) 
     
     
         11 . An inspection system, comprising:
 an optical system according to  claim 1 ,   wherein the inspection system is configured to inspect a photomask.   
     
     
         12 . A projection system, comprising:
 an optical system according to  claim 1 ,   wherein the projection system is a lithography projection system.   
     
     
         13 . An apparatus, comprising:
 an optical system according to  claim 1 ,   wherein the apparatus is a lithography apparatus.   
     
     
         14 .- 22 . (canceled) 
     
     
         23 . A method for regulating an optical system, the method comprising at least one of the following:
 i) regulating a position and/or spatial orientation of a first optical element relative to a first module sensor frame in a first optical control loop, and regulating a position and/or spatial orientation of the first module sensor frame relative to a base sensor frame in a first module control loop; and   ii) regulating a position and/or spatial orientation of a second optical element relative to a second module sensor frame in a second optical control loop, and regulating a position and/or spatial orientation of the second module sensor frame relative to the base sensor frame in a second module control loop.   
     
     
         24 . The optical system of  claim 5 , wherein both i) and ii) hold. 
     
     
         25 . The optical system of  claim 4 , wherein both i) and ii) hold. 
     
     
         26 . The optical system of  claim 3 , wherein both i) and ii) hold. 
     
     
         27 . The optical system of  claim 3 , wherein at least one of the following holds:
 the third actuator supports the first module holding frame on a base holding frame, and the fourth actuator supports the second module holding frame on the base holding frame;   the first module comprises the first optical element, the first module sensor frame, the first sensor, the first module holding frame and the first actuator;   the second module comprises the second optical element, the second module sensor frame, the second sensor, the second module holding frame and the second actuator; and   the first and/or second modules is/are interchangeable between the base sensor frame and the base holding frame.   
     
     
         28 . The optical system of  claim 2 , wherein both i) and ii) hold. 
     
     
         29 . The optical system of  claim 2 , wherein at least one of the following holds:
 the first module control loop and the first optical control loop are configured to interact with each other so that the position and orientation of the first and second optical elements are regulatable in each case in all six degrees of freedom relative to the base sensor frame; and   the second module control loop and the second optical control loop are configured to interact with each other so that the position and orientation of the first and second optical elements are regulatable in each case in all six degrees of freedom relative to the base sensor frame.   
     
     
         30 . The optical system of  claim 1 , wherein i) holds. 
     
     
         31 . The optical system of  claim 1 , wherein ii) holds. 
     
     
         32 . The optical system of  claim 1 , wherein at least one of the following holds:
 the first module control loop and the first optical control loop are configured to interact with each other so that the position and orientation of the first and second optical elements are regulatable in each case in all six degrees of freedom relative to the base sensor frame; and   the second module control loop and the second optical control loop are configured to interact with each other so that the position and orientation of the first and second optical elements are regulatable in each case in all six degrees of freedom relative to the base sensor frame.   
     
     
         33 . The optical system of  claim 1 , wherein at least one of the following holds:
 i) the first module control loop further comprises a first actuator configured to position and/or spatially orient the first optical element, wherein the first actuator is supported on a first module holding frame; and   ii) the second optical control loop further comprises a second actuator configured to position and/or spatially orient the second optical element, wherein the second actuator is supported on a second module holding frame.