US2019352113A1PendingUtilityA1

Transport device

48
Assignee: SHARP KKPriority: Jul 10, 2017Filed: Jul 10, 2017Published: Nov 21, 2019
Est. expiryJul 10, 2037(~11 yrs left)· nominal 20-yr term from priority
Inventors:Kenta Nakamura
C23C 14/042H05B 33/10H10P 72/78H10P 72/57H10P 72/3202H10P 72/3204B65H 5/222B65H 5/08
48
PatentIndex Score
0
Cited by
0
References
0
Claims

Abstract

A transport device moves a sheet member supported by adsorption portions to a space above a second table being a transport destination, and moves the adsorption portions in a direction of approaching the second table by reducing a speed gradually or stepwisely so as to bring the sheet member into contact with the second table. With this, a transport speed of the sheet member is improved, and air is prevented from entering a space between the sheet member and the table being a transport destination.

Claims

exact text as granted — not AI-modified
1  and  2 . (canceled) 
     
     
         3 . A transport device, which is configured to transport a sheet member from a first table to a second table, comprising:
 supporting ends of the sheet member placed on the first table with an adsorption portion or a plurality of adsorption portions;   moving the adsorption portion to a space above the second table; and   bringing the sheet member into the second table by moving the adsorption portion in a direction of approaching the second table at a speed being reduced gradually or stepwisely,   wherein the transport device includes the plurality of adsorption portions including a first adsorption portion and a second adsorption portion, and   the transport device further includes   bringing a region of the sheet member, which is supported by the first adsorption portion, into contact with the second table by moving the first adsorption portion in a direction of approaching the second table, and   bringing a region of the sheet member, which is supported by the second adsorption portion, into contact with the second table by moving the second adsorption portion in a direction of approaching the second table after the region being supported by the first adsorption portion is brought into contact with the second table.   
     
     
         4  and  5 . (canceled) 
     
     
         6 . The transport device according to  claim 3 , further comprising:
 rotating at least one of the plurality of adsorption portions after the plurality of adsorption portions support the sheet member and before the plurality of adsorption portions release the support of the sheet member.   
     
     
         7 . The transport device according to  claim 6 ,
 wherein the rotating at least one of the plurality of adsorption portions is performed after the plurality of adsorption portions support the sheet member and before the plurality of adsorption portions start moving to the space above the second table.   
     
     
         8 . The transport device according to  claim 3 , further comprising:
 an air sending unit arranged while facing the second table through inter mediation of the sheet member when the sheet member arrives at the space above the second table; and   sending air from the air sending unit to the sheet member when the adsorption portion is moved in the direction of approaching the second table.   
     
     
         9 . The transport device according to  claim 3 ,
 wherein the plurality of adsorption portions support the sheet member by sucking the sheet member.   
     
     
         10 . The transport device according to  claim 3 ,
 wherein the plurality of adsorption portions support the sheet member by attracting the sheet member with an electromagnetic force.   
     
     
         11 . The transport device according to  claim 3 ,
 wherein the plurality of adsorption portions have surfaces contact with the sheet member, the surfaces being formed of an elastic member.   
     
     
         12 . The transport device according to  claim 9 ,
 wherein a plurality of suction ports are formed in the surfaces of the plurality of adsorption portions, which are in contact with the sheet member.   
     
     
         13 . The transport device according to  claim 3 ,
 wherein a predetermined pattern is formed in a center of the sheet member.   
     
     
         14 . The transport device according to  claim 13 ,
 wherein the sheet member has a thickness from 10 μm to 50 μm.   
     
     
         15 . The transport device according to  claim 13 ,
 wherein the sheet member comprises a mask sheet forming a vapor deposition mask.   
     
     
         16 . The transport device according to  claim 13 ,
 wherein a device including the second table comprises an inspection device configured to inspect the predetermined pattern.   
     
     
         17 . The transport device according to  claim 13 ,
 wherein the sheet member comprises a flexible display panel.   
     
     
         18  and  19 . (canceled) 
     
     
         20 . A transport device, which is configured to transport a sheet member from a first table to a second table, comprising:
 supporting ends of the sheet member placed on the first table with a plurality of adsorption portions including a first adsorption portion and a second adsorption portion;   moving the plurality of adsorption portions to a space above the second table;   bringing a region of the sheet member, which is supported by the first adsorption portion, into contact with the second table by moving the first adsorption portion in a direction of approaching the second table; and   bringing a region of the sheet member, which is supported by the second adsorption portion, into contact with the second table by moving the second adsorption portion in a direction of approaching the second table after the region being supported by the first adsorption portion is brought into contact with the second table.   
     
     
         21 . The transport device according to  claim 20 ,
 wherein the sheet member is brought into contact with the second table by moving at least one of the first adsorption portion and the second adsorption portion in the direction of approaching the second table at a speed being reduced gradually or stepwisely.   
     
     
         22 . The transport device according to  claim 20 , further comprising:
 rotating at least one of the plurality of adsorption portions after the plurality of adsorption portions support the sheet member and before the plurality of adsorption portions release the support of the sheet member.   
     
     
         23 . The transport device according to  claim 22 ,
 wherein the rotating at least one of the plurality of adsorption portions is performed after the plurality of adsorption portions support the sheet member and before the plurality of adsorption portions start moving to the space above the second table.   
     
     
         24 . The transport device according to  claim 20 , further comprising:
 an air sending unit arranged while facing the second table through inter mediation of the sheet member when the sheet member arrives at the space above the second table; and   sending air from the air sending unit to the sheet member when the adsorption portion is moved in the direction of approaching the second table.   
     
     
         25 . A transport device, which is configured to transport a sheet member from a first table to a second table, comprising:
 supporting ends of the sheet member placed on the first table with an adsorption portion or a plurality of adsorption portions;   moving the adsorption portion to a space above the second table; and   bringing the sheet member into the second table by moving the adsorption portion in a direction of approaching the second table at a speed being reduced gradually or stepwisely,   wherein the transport device further includes the plurality of adsorption portions including a first adsorption portion and a second adsorption portion,   an air sending unit is arranged while facing the second table through intermediation of the sheet member when the sheet member arrives at the space above the second table, and   the transport device further includes sending air from the air sending unit to the sheet member when the adsorption portion moves in a direction of approaching the second table.   
     
     
         26 . The transport device according to  claim 25 ,
 wherein the plurality of adsorption portions support the sheet member by sucking the sheet member.

Join the waitlist — get patent alerts

Track US2019352113A1 — get alerts on status changes and closely related new filings.

We store only your email — no account needed. See our privacy policy.