Multi-cell excimer lamp

Abstract

An excimer lamp includes a plurality of sheets and a plurality of spacers arranged to form a stack of a plurality of cells in comprising a plurality of chambers. The plurality of sheets includes a first outer sheet, a second outer sheet and a plurality of interior sheets. Each sheet in the plurality of sheets has an outer edge and comprises a material that is transmissive to a target wavelength. Each spacer is placed between two sheets and near the outer edge of each sheet. Each chamber is defined by a volume at least partially enclosed by the two sheets and at least one spacer. An emission material is within each chamber. A first electrode is coupled to the first outer sheet, exterior to the stack, and a second electrode is coupled to the second outer sheet, exterior to the stack. A method of manufacturing the excimer lamp is also disclosed.

What is claimed is: 
     
         1 . An excimer lamp comprising:
 a plurality of sheets comprising a first outer sheet, a second outer sheet and a plurality of interior sheets, wherein each sheet in the plurality of sheets has an outer edge and comprises a material that is transmissive to a target wavelength;   a plurality of spacers, each spacer being placed between two sheets in the plurality of sheets and near the outer edge of each sheet, wherein the plurality of sheets and the plurality of spacers are arranged to form a stack of a plurality of cells including a plurality of chambers, each chamber being a volume at least partially enclosed by the two sheets and at least one spacer in the plurality of spacers;   an emission material within each chamber in the plurality of chambers;   a first electrode coupled to the first outer sheet, exterior to the stack; and   a second electrode coupled to the second outer sheet, exterior to the stack.   
     
     
         2 . The excimer lamp of  claim 1  wherein the target wavelength is in a range from 120 nm to 400 nm. 
     
     
         3 . The excimer lamp of  claim 1  further comprising a third electrode located within the stack. 
     
     
         4 . The excimer lamp of  claim 3  wherein the third electrode comprises a ring or a plate with apertures. 
     
     
         5 . The excimer lamp of  claim 3  wherein the third electrode is located halfway between the first outer sheet and the second outer sheet in the stack. 
     
     
         6 . The excimer lamp of  claim 1  further comprising a frame surrounding the plurality of interior sheets and the plurality of spacers. 
     
     
         7 . The excimer lamp of  claim 1  wherein each chamber in the plurality of chambers has a height of less than 1.0 mm. 
     
     
         8 . The excimer lamp of  claim 1  wherein each chamber in the plurality of chambers has a length-to-height aspect ratio of at least 10. 
     
     
         9 . The excimer lamp of  claim 1  wherein the plurality of chambers are in fluid communication with each other. 
     
     
         10 . The excimer lamp of  claim 1  further comprising a sinusoidal power supply electrically coupled to the first electrode and the second electrode. 
     
     
         11 . A method of manufacturing an excimer lamp, the method comprising:
 providing a plurality of sheets comprising a first outer sheet, a second outer sheet and a plurality of interior sheets, wherein each sheet in the plurality of sheets has an outer edge and comprises a material that is transmissive to a target wavelength;   sealing the first outer sheet to an adjacent lamp component;   stacking a plurality of spacers in an alternating arrangement with the plurality of sheets, wherein:
 each spacer in the plurality of spacers is placed between two sheets in the plurality of sheets and near the outer edge of each sheet; and 
 the plurality of sheets and plurality of spacers are arranged to form a stack of a plurality of cells including a plurality of chambers, each chamber being a volume at least partially enclosed by the two sheets and at least one spacer in the plurality of spacers; 
   filling the plurality of chambers with an emission material;   sealing the second outer sheet to the stack;   coupling a first electrode to an outer surface of the first outer sheet; and   coupling a second electrode to an outer surface of the second outer sheet.   
     
     
         12 . The method of  claim 11  wherein the lamp component to which the first outer sheet is sealed is a frame, wherein the frame is between the first outer sheet and the second outer sheet and surrounds the plurality of interior sheets and the plurality of spacers. 
     
     
         13 . The method of  claim 11  further comprising coupling a sinusoidal power supply to the first electrode and the second electrode.