Gas distribution hub for plasma processing chamber

Abstract

A gas distribution hub for a plasma reactor chamber has a nozzle includes an inner gas injection passage and an outer gas injection passage, each open to a bottom surface of the hub. For each of the inner and outer gas injection passages, multiple radial elevated feed lines have input ends at a periphery of the hub to receive gas and output ends overlying the respective gas injection passage. Respective axial drop lines connect the respective output ends of the radial elevated feed lines to the respective gas injection passages.

1 - 20 . (canceled) 
     
     
         21 . A gas distributor for a plasma reactor chamber, comprising:
 a hub having formed therein
 a nozzle including an inner gas injection passage and an outer gas injection passage, each of the inner gas injection passage and outer gas injection passage being open at a bottom surface of the hub, 
 a first plurality of radial elevated feed lines having respective input ends at a periphery of the hub to receive gas and respective output ends overlying the inner gas injection passage, 
 a first plurality of axial drop lines connected between the respective output ends of the first plurality of radial elevated feed lines and the inner gas injection passage; 
 a second plurality of radial elevated feed lines having respective input ends at the periphery of the hub and respective output ends overlying the outer gas injection passage, and 
 a second plurality of axial drop lines connected between the respective output ends of said the plurality of radial elevated feed lines and the outer gas injection passages. 
   
     
     
         22 . The gas distributor of  claim 21 , wherein said inner gas injection passage and outer gas injection passage each extend annularly on the bottom surface. 
     
     
         23 . The gas distributor of  claim 22 , wherein said inner gas injection passage and outer gas injection passage are concentric. 
     
     
         24 . The gas distributor of  claim 22 , wherein each of said inner gas injection passage and outer gas injection passage includes a plurality of separate sections. 
     
     
         25 . The gas distributor of  claim 24 , wherein:
 each of the first plurality of axial drop lines intersects a different section of the inner gas injection passage, and   each of the second plurality of axial drop lines intersects a different section of the outer gas injection passage.   
     
     
         26 . The gas distributor of  claim 25 , wherein:
 each of the first plurality of axial drop lines intersects a midpoint of the section of the inner gas injection passage, and   each of the second plurality of axial drop lines intersects a midpoint of the section of the outer gas injection passage.   
     
     
         27 . The gas distributor of  claim 22 , wherein each of said inner gas injection passage and outer gas injection passage forms a complete annulus. 
     
     
         28 . The gas distributor of  claim 21 , wherein the inner gas injection passage extends vertically. 
     
     
         29 . The gas distributor of  claim 21 , wherein the outer gas injection passage is angled outwardly. 
     
     
         30 . The gas distributor of  claim 21 , wherein:
 the first plurality of axial drop lines intersect the inner gas injection passage at respective drop points evenly spaced along said inner gas injection passage, and   the second plurality of axial drop lines intersect the outer gas injection passage at respective drop points evenly spaced along the said outer gas injection passage.   
     
     
         31 . The gas distributor of  claim 21 , further comprising:
 a first plurality of supply ports evenly spaced around the periphery of the gas nozzle;   a second plurality of supply ports evenly spaced around the periphery of the gas nozzle, and offset from the first plurality of gas supply ports.   
     
     
         32 . The gas distributor of  claim 31 , wherein the first plurality of supply ports are connected to respective pairs of the first plurality of radial elevated feed lines, and the second plurality of supply ports are connected to respective pairs of the second plurality of radial elevated feed lines.