Multi-cassette carrying case

Abstract

Embodiments of a multi-cassette carrying case are provided herein. In some embodiments a method for transporting a substrate from a first processing device to a second processing device includes docking a substrate cassette to a first chamber; pumping down pressure in the substrate cassette; transferring a substrate through the first chamber to the substrate cassette; sealing the substrate cassette and moving the substrate cassette having the substrate disposed therein from the first chamber to a second chamber; docking the substrate cassette to the second chamber; and transferring the substrate from the substrate cassette through the second chamber.

1 . A method for transporting a substrate from a first processing device to a second processing device, comprising:
 docking a substrate cassette to a first chamber;   pumping down pressure in the substrate cassette;   transferring a substrate through the first chamber to the substrate cassette;   sealing the substrate cassette and moving the substrate cassette having the substrate disposed therein from the first chamber to a second chamber;   docking the substrate cassette to the second chamber; and   transferring the substrate from the substrate cassette through the second chamber.   
     
     
         2 . The method of  claim 1 , further comprising maintaining vacuum pressure in the substrate cassette while moving the substrate cassette from the first chamber to the second chamber. 
     
     
         3 . The method of  claim 1 , further comprising creating a seal between the substrate cassette and the second chamber after docking the substrate cassette to the second chamber. 
     
     
         4 . The method of  claim 1 , wherein the substrate cassette includes a body having an upper portion and a lower portion, the upper portion coupled to the lower portion to define an interior volume. 
     
     
         5 . The method of  claim 4 , wherein transferring a substrate through the first chamber to the substrate cassette comprises placing the substrate on an inner surface of the lower portion. 
     
     
         6 . The method of  claim 1 , wherein sealing the substrate cassette includes using a locking mechanism to couple an upper portion of the substrate cassette to a lower portion of the substrate cassette. 
     
     
         7 . The method of  claim 1 , further comprising placing the substrate cassette in a multi-cassette carrying case prior to moving the substrate cassette from the first chamber to the second chamber. 
     
     
         8 . The method of  claim 7 , wherein an interior volume of the multi-cassette carrying case is fluidly coupled to a vacuum source. 
     
     
         9 . A method for transporting a substrate from a first processing device to a second processing device, comprising:
 docking a substrate cassette to a first chamber;   transferring a substrate through the first chamber to the substrate cassette;   sealing the substrate cassette;   using a vacuum source to maintain pressure in the substrate cassette while in transport; and   docking the substrate cassette to a second chamber.   
     
     
         10 . The method of  claim 9 , further comprising transferring the substrate from the substrate cassette through the second chamber after docking the substrate cassette to the second chamber. 
     
     
         11 . The method of  claim 9 , further comprising creating a seal between the substrate cassette and the second chamber after docking the substrate cassette to the second chamber. 
     
     
         12 . The method of  claim 9 , further comprising placing the substrate cassette in a multi-cassette carrying case prior to docking the substrate cassette to a second chamber. 
     
     
         13 . The method of  claim 12 , wherein the multi-cassette carrying case includes a body having an inner volume, a door coupled to the body to selectively seal off the inner volume, and a plurality of cassette holders disposed in the inner volume to hold one or more substrate cassettes. 
     
     
         14 . The method of  claim 12 , wherein the multi-cassette carrying case includes a vacuum port coupled to the vacuum source to maintain pressure in the substrate cassette while in transport. 
     
     
         15 . The method of  claim 9 , wherein a substrate transfer robot is used to transfer the substrate through the first chamber to the substrate cassette. 
     
     
         16 . The method of  claim 9 , wherein the substrate cassette includes a body having an upper portion and a lower portion, the upper portion coupled to the lower portion to define an interior volume. 
     
     
         17 . The method of  claim 9 , further comprising pumping down pressure in the substrate cassette prior to sealing the substrate cassette. 
     
     
         18 . The method of  claim 9 , further comprising transferring the substrate from the substrate cassette to the second chamber after docking the substrate cassette to the second chamber.