Transport Path Correction Techniques and Related Systems, Methods and Devices

Abstract

A printer deposits material onto a substrate as part of a manufacturing process for an electronic product. At least one mechanical component experiences mechanical error, which is mitigated using transducers that equalize position of a transported thing, e.g., to provide an “ideal” conveyance path; a substrate conveyance system and/or a printhead conveyance system can each use transducers in this manner to improve precise droplet placement. In one embodiment, errors are measured in advance, with corrections being “played back” during production runs to mitigate repeatable transport path error. In a still more detailed embodiment, the transducers can be predicated on voice coils, which cooperate with a floatation table and floating, mechanical pivot assembly to provide frictionless, but mechanically-supported error correction.

We claim: 
     
         1 . An electronic product manufacturing apparatus, comprising:
 a deposition source to deposit a material on a substrate;   a flotation table to support the substrate on a fluidic cushion while the material is being deposited thereon; and   a substrate transport system, comprising:
 a first component to travel along a substrate transport track according to electronic stimuli, the substrate transport track extending in a first direction; 
 a second component to selectively engage the substrate so as to transport the substrate in the first direction; and 
 at least one substrate transport actuator coupling the first component and the second component, the at least one substrate transport actuator to displace the second component in a second direction orthogonal to the first direction,
 wherein the at least one substrate transport actuator adjusts position of the second component in the second direction as the second component travels along the first direction. 
 
   
     
     
         2 . The electronic product manufacturing apparatus of  claim 1 , wherein the deposition source comprises a print head assembly comprising a print head having nozzles to eject droplets of the material onto the substrate, the material including a film-forming material. 
     
     
         3 . The electronic product manufacturing apparatus of  claim 2 , wherein the print head assembly further comprises a print head assembly transport system coupled to a print head assembly track extending in the second direct, wherein the print head assembly transport system further comprises:
 a first print head assembly component that travels along the print head assembly track according to electronic stimuli;   a second print head assembly component coupled to the print head so as to move the print head in the second direction; and   at least one print head actuator coupling the first print head assembly component and the second print head assembly component, the at least one print head actuator to displace the second component and the print head in a direction parallel to the first direction;
 wherein the at least one print head actuator adjusts position of the second component in the first direction as the second component travels along the second direction. 
   
     
     
         4 . The electronic product manufacturing apparatus of  claim 2 , further comprising a substrate processing system coupled with the substrate transport system to form a thin-film layer by solidifying the film-forming material in a process of at least one of curing or drying of the film-forming material. 
     
     
         5 . The electronic product manufacturing apparatus of  claim 4  wherein the thin-film layer further comprises at least one of an organic encapsulation layer of a light-emitting device or an organic light generating layer device of the light-emitting device. 
     
     
         6 . The electronic product manufacturing apparatus of  claim 1 , wherein the second component comprises a vacuum chuck to selectively engage the substrate. 
     
     
         7 . The electronic product manufacturing apparatus of  claim 1  wherein the substrate transport system further comprises a mechanical pivot that couples the first component and the second component to permit the second component to rotate relative to the first component. 
     
     
         8 . The electronic product manufacturing apparatus of  claim 1 , wherein:
 the electronic product manufacturing apparatus comprises an enclosure for a controlled atmosphere; and   the deposition source comprises a source of the material within the enclosure.   
     
     
         9 . The electronic product manufacturing apparatus of  claim 1 , wherein the at least one substrate transport actuator comprises one of a voice coil, a linear motor or a piezoelectric actuator. 
     
     
         10 . An electronic product manufacturing apparatus, comprising:
 a deposition source to deposit a material on a substrate;   a flotation table to support the substrate on a fluidic cushion while the material is being deposited thereon; and   a substrate transport system, comprising:
 a memory to store predetermined data 
 a first component to travel along a substrate transport track according to electronic stimuli, the substrate transport track extending in a first direction, 
 a second component to selectively engage the substrate so as to transport the substrate in the first direction, and 
 at least one substrate transport actuator coupling the first component and the second component, the at least one substrate transport actuator to displace the second component in a second direction orthogonal to the first direction;
 wherein the at least one substrate transport actuator adjusts position of the second component in the second direction as the second component travels along the first direction. 
 
   
     
     
         11 . The electronic product manufacturing apparatus of  claim 10 , wherein the at least one substrate transport actuator is to be driven according to the predetermined data and depending on the electronic stimuli. 
     
     
         12 . The electronic product manufacturing apparatus of  claim 10 , wherein the at least one substrate transport actuator is to be driven according to the predetermined data and depending on a position of the first component along the track. 
     
     
         13 . The electronic product manufacturing apparatus of  claim 10 , wherein the first component is to be driven according to the predetermined data, and the predetermined data defines a substrate velocity for the first component in the first direction. 
     
     
         14 . The electronic product manufacturing apparatus of  claim 10 , wherein the deposition source comprises a print head having nozzles to eject droplets of the material onto the substrate, the material including a film-forming material, and
 the print head is to be driven according to a second direction print head velocity defined by the predetermined data.   
     
     
         15 . An electronic product manufacturing apparatus, comprising:
 a deposition source to deposit a material on a substrate;   a flotation table to support the substrate on a fluidic cushion while the material is being deposited thereon; and   a substrate transport system comprising
 a first component to travel along a substrate transport track according to electronic stimuli, the substrate transport track extending in a first direction, 
 a second component to selectively engage the substrate so as to transport the substrate in the first direction, and 
 at least two substrate transport actuators coupling the first component and the second component, the at least two substrate transport actuators to displace the second component in a second direction orthogonal to the first direction;
 wherein the at least two substrate transport actuators adjust position of the second component in the second direction as the second component travels along the first direction so as to cause the second component to travel along a straight line in the first direction. 
 
   
     
     
         16 . The electronic product manufacturing apparatus of  claim 15 , wherein the at least two substrate transport actuators are actuated using common-mode control to displace the second component and the substrate in the second direction. 
     
     
         17 . The electronic product manufacturing apparatus of  claim 15 , wherein the at least two substrate transport actuators are actuated using differential mode control to rotate the substrate. 
     
     
         18 . The electronic product manufacturing apparatus of  claim 15 , wherein the substrate transport system further comprises a mechanical pivot that couples the first component and the second component, and wherein the at least two substrate transport actuators are actuated using common-mode control to displace the mechanical pivot in the second direction. 
     
     
         19 . The electronic product manufacturing apparatus of  claim 18 , wherein the mechanical pivot defines a pivot point, and the at least two substrate transport actuators are actuated using differential mode control to rotate the second component relative to the first component about the pivot point. 
     
     
         20 . An electronic product manufacturing apparatus, comprising:
 a deposition source to deposit a material on a substrate;   a flotation table to support the substrate on a fluidic cushion while the material is being deposited thereon; and   a substrate transport system comprising
 a first component to travel along a substrate transport track according to electronic stimuli, the substrate transport track extending in a first direction; 
 a second component to selectively engage the substrate so as to transport the substrate in the first direction in a plane of conveyance while the material is being deposited thereon; and 
 at least one substrate transport actuator coupling the first component and the second component, the at least one substrate transport actuator to displace the second component in a second direction orthogonal to the first direction and parallel to the plane of conveyance;
 wherein the at least one substrate transport actuator adjusts position of the second component in the second direction as the second component travels along the first direction so as to cause the second component to travel along a straight line in the first direction. 
 
   
     
     
         21 . The electronic product manufacturing apparatus of  claim 20 , wherein the at least one substrate transport actuator is to displace the substrate toward and away from the deposition source along a third direction orthogonal to the first direction and normal to the plane of conveyance.