Imprinting method and manufacturing method

Abstract

An imprinting method for forming a pattern on a substrate with use of a mold, includes performing a running-in process in which the mold is brought into contact with a composition on a first substrate held by a holding unit, the composition on the first substrate is exposed, and the mold is released. After the running-in process, the method includes performing an imprinting process in which the mold is brought into contact with a composition on a second substrate, the composition on the second substrate is exposed, the mold is released, and the pattern is formed on the composition on the second substrate. A base material of the first substrate is higher in heat conductivity than a base material of the second substrate. The second substrate is used as an imprint mold.

What is claimed is: 
     
         1 . An imprinting method for forming a pattern on a substrate with use of a mold, the imprinting method comprising:
 performing a running-in process in which the mold is brought into contact with a first composition on a first substrate held by a holding unit, the first composition on the first substrate is exposed, and the mold is separated from the first composition on the first substrate; and   performing, after the running-in process, an imprinting process in which the mold is brought into contact with a second composition on a second substrate, the second composition on the second substrate is exposed, the mold is separated from the second composition on the second substrate, and the pattern is formed on the second composition on the second substrate,   wherein a first base material of the first substrate is higher in heat conductivity than a second base material of the second substrate, and   wherein the second substrate is configured as an imprint mold.   
     
     
         2 . The imprinting method according to  claim 1 , wherein the first base material of the first substrate includes a metal. 
     
     
         3 . The imprinting method according to  claim 1 ,
 wherein the second substrate includes a chromium film formed on a surface on which the composition is to be provided, and   wherein the first substrate does not include the chromium film.   
     
     
         4 . An imprinting method for forming a pattern on a substrate with use of a mold, the imprinting method comprising:
 performing a running-in process in which the mold is brought into contact with a first composition on a first substrate, the first composition on the first substrate is exposed, and the mold is separated from the first composition on the first substrate; and   performing, after the running-in process, an imprinting process in which the mold is brought into contact with a second composition on a second substrate, the second composition on the second substrate is exposed, the mold is separated from the second composition on the second substrate, and the pattern is formed on the second composition on the second substrate,   wherein the first substrate includes a first metal film formed on a first surface on which the first composition is to be provided,   wherein the second substrate includes a second metal film formed on a second surface on which the second composition is to be provided,   wherein the first metal film formed on the first substrate is higher in reflectivity than the second metal film formed on the second substrate, and   wherein the second substrate is configured as an imprint mold.   
     
     
         5 . The imprinting method according to  claim 4 ,
 wherein the first metal film of the first substrate includes an aluminum film, and   wherein the second metal film of the second substrate includes a chromium film.   
     
     
         6 . The imprinting method according to  claim 4 , wherein a first base material of the first substrate is higher in heat conductivity than a second base material of the second substrate. 
     
     
         7 . The imprinting method according to  claim 4 , wherein a base material of the first substrate is a metal. 
     
     
         8 . An imprinting method for forming a pattern on a substrate with use of a mold, the imprinting method comprising:
 performing a running-in process in which the mold is brought into contact with a first composition on a first substrate, the first composition on the first substrate is exposed, and the mold is separated from the first composition on the first substrate; and   performing, after the running-in process, an imprinting process in which the mold is brought into contact with a second composition on a second substrate, the second composition on the second substrate is exposed, the mold is separated from the second composition on the second substrate, and the pattern is formed on the second composition on the second substrate,   wherein a first base material of the first substrate is same as a second base material of the second substrate,   wherein the second substrate includes a metal film formed on a surface on which the composition is to be provided,   wherein the first substrate does not include the metal film, and   wherein the second substrate is configured as an imprint mold.   
     
     
         9 . The imprinting method according to  claim 1 , wherein the first substrate is cooled in the exposure in the running-in process. 
     
     
         10 . The imprinting method according to  claim 4 , wherein the first substrate is cooled in the exposure in the running-in process. 
     
     
         11 . The imprinting method according to  claim 8 , wherein the first substrate is cooled in the exposure in the running-in process. 
     
     
         12 . The imprinting method according to  claim 9 , wherein the first substrate is cooled by a temperature-controlled fluid that flows in the holding unit holding the first substrate. 
     
     
         13 . The imprinting method according to  claim 10 , wherein the first substrate is cooled by a temperature-controlled fluid that flows in a holding unit holding the first substrate. 
     
     
         14 . The imprinting method according to  claim 11 , wherein the first substrate is cooled by a temperature-controlled fluid that flows in a holding unit holding the first substrate. 
     
     
         15 . The imprinting method according to  claim 1 , wherein a first area of a first surface of the first substrate that comes into contact with the holding unit holding the first substrate is larger than a second area of a second surface of the second substrate that comes into contact with the holding unit holding the second substrate. 
     
     
         16 . The imprinting method according to  claim 4 , wherein a first area of a first surface of the first substrate that comes into contact with a holding unit holding the first substrate is larger than a second area of a second surface of the second substrate that comes into contact with the holding unit holding the second substrate. 
     
     
         17 . The imprinting method according to  claim 8 , wherein a first area of a first surface of the first substrate that comes into contact with a holding unit holding the first substrate is larger than a second area of a second surface of the second substrate that comes into contact with the holding unit holding the second substrate. 
     
     
         18 . The imprinting method according to  claim 1 , wherein, in the running-in process, heat absorbed by the first substrate in the exposure of the first composition on the first substrate is transferred to the holding unit. 
     
     
         19 . A mold manufacturing method, comprising:
 forming a pattern on the second composition on the second substrate using the imprinting method according to  claim 1 ; and   manufacturing a mold by forming the pattern on the second substrate.   
     
     
         20 . A mold manufacturing method, comprising:
 forming a pattern on the second composition on the second substrate using the imprinting method according to  claim 4 ; and   manufacturing a mold by forming the pattern on the second substrate.   
     
     
         21 . A mold manufacturing method, comprising:
 forming a pattern on the second composition on the second substrate using the imprinting method according to  claim 8 ; and   manufacturing a mold by forming the pattern on the second substrate.   
     
     
         22 . An article manufacturing method, comprising:
 forming a pattern on a substrate with use of the mold manufactured by the manufacturing method according to  claim 19 ; and   processing the substrate to obtain an article.   
     
     
         23 . An article manufacturing method, comprising:
 forming a pattern on a substrate with use of the mold manufactured by the manufacturing method according to  claim 20 ; and   processing the substrate to obtain an article.   
     
     
         24 . An article manufacturing method, comprising:
 forming a pattern on a substrate with use of the mold manufactured by the manufacturing method according to  claim 21 ; and   processing the substrate to obtain an article.