Pad temperature adjustment apparatus for adjusting temperature of polishing pad, and polishing apparatus

Abstract

A pad temperature adjustment apparatus for adjusting the temperature of a polishing pad of a polishing apparatus, including: a heat conduction part for conducting heat between the heat conduction part and the polishing pad; an arm that extends from the heat conduction part, wherein a distal end of the arm is formed in a tapered shape; an arm mount for installing the arm, wherein an arm guide having a tapered groove shape corresponding to the shape of the arm is formed in the arm mount; and a falling prevention member for preventing the arm from falling out of the arm guide.

What is claimed is: 
     
         1 . A pad temperature adjustment apparatus for adjusting a temperature of a polishing pad, the pad temperature adjustment apparatus comprising:
 a heat conduction part for conducting heat to the polishing pad;   an arm that extends from the heat conduction part, wherein a distal end of the arm is formed in a tapered shape;   an arm mount for installing the arm and that includes an arm guide, the arm guide having a tapered groove shape corresponding to the shape of the arm; and   a falling prevention member for preventing the arm from falling out of the arm guide.   
     
     
         2 . The pad temperature adjustment apparatus according to  claim 1 ,
 wherein the arm comprise a plurality of arms,   wherein at least one of the plurality of arms is formed in a dovetail tenon shape, and   the arm guide for the dovetail tenon-shaped arm is formed in a dovetail groove shape.   
     
     
         3 . The pad temperature adjustment apparatus according to  claim 1 , further comprising a heating/cooling member being provided to the inside of the heat conduction part. 
     
     
         4 . The pad temperature adjustment apparatus according to  claim 3 , wherein the heating/cooling member includes a heat medium flow passage for flowing a heat medium supplied from a heat medium source, and
 the arm mount is provided with a coupling element that is connected to the heat medium flow passage when the arm is installed in the arm mount.   
     
     
         5 . The pad temperature adjustment apparatus according to  claim 4 , wherein the coupling element is provided so that a gap is formed between the coupling element and the arm mount. 
     
     
         6 . The pad temperature adjustment apparatus according to  claim 3 , wherein the heating/cooling member comprises a heater and/or a cooler. 
     
     
         7 . The pad temperature adjustment apparatus according to  claim 1 , wherein the arm guide having a tapered groove shape is formed by:
 a rectangular groove; and   a block that is at least partially positioned on the inside of the rectangular groove, wherein a fixation position and/or a fixation angle of the block is adjustable.   
     
     
         8 . A polishing apparatus comprising:
 a polishing table for holding a polishing pad;   a polishing head that is provided above the polishing table so as to oppose the polishing table; and   the pad temperature adjustment apparatus for adjusting a temperature of the polishing pad, the pad temperature adjustment apparatus including:   a heat conduction part for conducting heat to the polishing pad;   an arm that extends from the heat conduction part, wherein a distal end of the arm is formed in a tapered shape;   an arm mount for installing the arm and that includes an arm guide, the arm guide having a tapered groove shape corresponding to the shape of the arm; and   a falling prevention member for preventing the arm from falling out of the arm guide.   
     
     
         9 . The polishing apparatus according to  claim 8 , further comprising a vertical movement apparatus for vertically moving the pad temperature adjustment apparatus. 
     
     
         10 . The polishing apparatus according to  claim 8 , wherein a surface of the polishing table to which the polishing pad is attached is coated with a material having a low coefficient of friction. 
     
     
         11 . The polishing apparatus according to  claim 8 ,
 wherein the arm comprise a plurality of arms,   wherein at least one of the plurality of arms is formed in a dovetail tenon shape, and   the arm guide for the dovetail tenon-shaped arm is formed in a dovetail groove shape.   
     
     
         12 . The polishing apparatus according to  claim 8 , wherein the pad temperature adjustment apparatus comprises a heating/cooling member being provided to the inside of the heat conduction part. 
     
     
         13 . The polishing apparatus according to  claim 12 , wherein the heating/cooling member includes a heat medium flow passage for flowing a heat medium supplied from a heat medium source, and
 the arm mount is provided with a coupling element that is connected to the heat medium flow passage when the arm is installed in the arm mount.   
     
     
         14 . The polishing apparatus according to  claim 13 , wherein the coupling element is provided so that a gap is formed between the coupling element and the arm mount. 
     
     
         15 . The polishing apparatus according to  claim 12 , wherein the heating/cooling member comprises a heater and/or a cooler. 
     
     
         16 . The polishing apparatus according to  claim 8 , wherein the arm guide having a tapered groove shape is formed by:
 a rectangular groove; and   a block that is at least partially positioned on the inside of the rectangular groove, wherein a fixation position and/or a fixation angle of the block is adjustable.