Workpiece surface detection method and system using the same

Abstract

A detecting method for a workpiece surface includes the following steps. Firstly, a workpiece is provided with a first environment, wherein the first environment has a first environmental temperature higher than a first saturation temperature corresponding to an environmental-relative humidity. Then, the workpiece is provided with a second environment, wherein the second environment has a second environmental temperature lower than the first environmental temperature, such that a itself-temperature of the workpiece reduces to a mist temperature, wherein the mist temperature is substantially equal to or higher than the second environmental temperature. Then, the workpiece is provided with a mist environment, wherein the mist environment has a mist-saturation temperature corresponding to a mist-environmental relative humidity is equal to or higher than the mist temperature for misting a surface of the workpiece. Then, the surface of the misted workpiece is detected.

What is claimed is: 
     
         1 . A detecting method for a workpiece surface, comprising:
 providing a workpiece with a first environment, wherein the first environment has a first environmental temperature higher than a first saturation temperature corresponding to a first environmental-relative humidity of the first environment;   providing the workpiece with a gas, wherein the gas has a gas-saturation temperature higher than a itself-temperature of the workpiece for misting a surface of the workpiece; and   detecting the surface of the misted workpiece.   
     
     
         2 . The detecting method according to  claim 1 , wherein the surface of the misted workpiece is detected by way of non-contact. 
     
     
         3 . The detecting method according to  claim 1 , wherein the step of providing the workpiece with the first environment is completed in a first space; after the step of providing the workpiece with the first environment, the detecting method further comprises:
 transporting the workpiece to a mist space for performing the step of providing the workpiece with the gas.   
     
     
         4 . The detecting method according to  claim 1 , wherein the step of providing the workpiece with the first environment and the step of providing the workpiece with the gas are completed in the same space. 
     
     
         5 . A detecting system for a workpiece surface, comprising:
 a first air-conditioning module configured to provide a workpiece with a first environment, wherein the first environment has a first environmental temperature higher than a first saturation temperature corresponding to a first environmental relative humidity of the first environment;   a gas provider configured to provide the workpiece with a gas, wherein the gas has a gas-saturation temperature higher than a itself-temperature of the workpiece for misting a surface of the workpiece; and   a detecting module configured to detect the surface of the misted workpiece.   
     
     
         6 . The detecting system according to  claim 5 , further comprising:
 a temperature sensor configured to detect whether the itself-temperature of the workpiece is lower than the gas-saturation temperature.   
     
     
         7 . The detecting system according to  claim 5 , wherein the first air-conditioning module and the gas provider are disposed within a first space and a mist space respectively, and the first space and the mist space are different spaces. 
     
     
         8 . The detecting system according to  claim 5 , wherein the first air-conditioning module and the gas provider are located at the same space.