Cooling plate

Abstract

The present disclosure relates to the technical filed of cooling equipment in the vacuum coating filed, and discloses a cooling plate, including a cooling plate body and a circulating water channel arranged in the cooling plate body; wherein a water-inlet channel and a water-return channel of the circulating water channel are in parallel. By arranging the circulating water channel in which the water-inlet channel and the water-return channel are in parallel in the cooling plate body, the cooling plate provided by the present disclosure improves the heat exchange efficiency and solves the problem of the temperature non-uniformity of the entire cooling plate due to the temperature difference between the inlet water and returned water.

1 . A cooling plate, comprising a cooling plate body and a circulating water channel arranged in the cooling plate body; wherein a water-inlet channel and a water-return channel of the circulating water channel are in parallel. 
     
     
         2 . The cooling plate of  claim 1 , wherein the cooling plate body is divided into a plurality of subsections of an integral structure, each subsection is provided with a set of independent circulating water channel. 
     
     
         3 . The cooling plate of  claim 2 , wherein each subsection of the cooling plate body is a groove having side walls shared by adjacent subsections, each circulating water channel is arranged in the corresponding groove. 
     
     
         4 . The cooling plate of  claim 3 , wherein the circulating water channel comprises water grooves milled on a surface of the groove with parallel water inlet and return, and/or water pipes with parallel water inlet and return. 
     
     
         5 . The cooling plate of  claim 4 , wherein bottom plates are further arranged on the cooling plate body; the cooling plate body is divided into four rectangular grooves with two center lines thereof as base lines; each groove is inlaid with a bottom plate sealingly connected with the groove. 
     
     
         6 . The cooling plate of  claim 5 , wherein a plurality of bosses are arranged on the cooling plate body at positions staggered to the circulating water channel; accommodating holes corresponding to the bosses are arranged on the bottom plate; the boss is disposed in the accommodating hole and is connected to the bottom plate. 
     
     
         7 . The cooling plate of  claim 6 , wherein air distribution pipes are arranged on the bottom plate; penetrated air holes are further arranged on the cooling plate body at positions staggered to the circulating water channel; vent holes corresponding to the air holes are arranged on the bottom plate; air injection holes communicating with the air holes and the vent holes are arranged on the air distribution pipes. 
     
     
         8 . The cooling plate of  claim 7 , wherein an air distribution pipe is arranged on a diagonal line of each bottom plate respectively, and air inlet pipes are arranged on each air distribution pipe. 
     
     
         9 . The cooling plate of  claim 8 , wherein a main air inlet pipe and a plurality of the air distribution pipes are arranged on the bottom plate, the air distribution pipes communicate with the main air inlet pipe. 
     
     
         10 . The cooling plate of  claim 1 , wherein strip bulges are arranged on the circulating water channel in a water flowing direction. 
     
     
         11 . The cooling plate of  claim 1 , wherein the cooling plate body is provided with a thermocouple detecting temperature uniformity of the cooling plate and/or a flow controllable circulating water bump.