Apparatus and method for providing fluid for immersion lithography

Abstract

A liquid immersion lithography apparatus includes a projection system having a final optical element, a stage movable in a scanning direction beneath the projection system and arranged to support a substrate, and a nozzle member disposed to surround at least a lower part of the final optical element. The nozzle member has a first aperture disposed on one side of the final optical element and a second aperture disposed on an other side of the final optical element. During exposure, immersion liquid is supplied and recovered by the nozzle member using the first and second apertures to provide a flow of the immersion liquid across an end surface of the final optical element. The flow of the immersion liquid across the end surface of the final optical element is across the scanning direction.

What is claimed is: 
     
         1 . A liquid immersion lithography apparatus comprising:
 a projection system having a final optical element;   a stage which is movable in a scanning direction beneath the projection system and which is arranged to support a substrate; and   a nozzle member, spaced from the final optical element and disposed to surround at least a lower part of the final optical element, wherein   the nozzle member has a first aperture disposed on one side of the final optical element and a second aperture disposed on an other side of the final optical element,   during exposure, immersion liquid is supplied from the nozzle member and recovered by the nozzle member using the first and second apertures such that the immersion liquid is supplied on the one side of the final optical element and recovered on the other side of the final optical element to provide a flow of the immersion liquid across an end surface of the final optical element,   the flow of the immersion liquid across the end surface of the final optical element is across the scanning direction, and   the substrate is exposed with exposure light using the projection system while moving the substrate in the scanning direction, the exposure light passing through the immersion liquid filling a gap between the final optical element and the substrate.