Electro-optical device, projection-type display device, electronic device, and manufacturing method of the electro-optical device

Abstract

An electro-optical device includes a pixel electrode provided over one side of a substrate, a conductive layer provided between the substrate and the pixel electrode, and a relay electrode provided between the substrate and the conductive layer. The conductive layer includes a first conduction section protruding toward the pixel electrode and a second conduction section protruding toward the relay electrode. The first conduction section has an upper surface which is in contact with the pixel electrode and the second conduction section has a bottom surface which is in contact with the relay electrode. The upper surface of the first conduction section is a part of the conductive layer that is farthest from the substrate. The pixel electrode is electrically connected to the relay electrode through the conductive layer. At least an inside of the first conduction section is filled with an insulating material.

What is claimed is: 
     
         1 . An electro-optical device comprising:
 a pixel electrode provided over one side of a substrate;   a conductive layer provided between the substrate and the pixel electrode; and   a relay electrode provided between the substrate and the conductive layer,   wherein
 the conductive layer includes a first conduction section protruding toward the pixel electrode and a second conduction section protruding toward the relay electrode, 
 the first conduction section has an upper surface which is in contact with the pixel electrode and the second conduction section has a bottom surface which is in contact with the relay electrode, the upper surface of the first conduction section being a part of the conductive layer that is farthest from the substrate, 
 the pixel electrode is electrically connected to the relay electrode through the conductive layer, and 
 at least an inside of the first conduction section is filled with an insulating material. 
   
     
     
         2 . An electro-optical device comprising:
 a substrate;   a reflective layer provided above the substrate;   a conductive layer provided between the substrate and the reflective layer; and   a relay electrode provided between the substrate and the conductive layer,   wherein
 the conductive layer includes a first plate that is positioned apart from the reflective layer and the relay layer, a first conduction section that protrudes from the first plate toward the reflective layer, and a second conduction section that protrudes from the first plate toward the relay layer, 
 the reflective layer is electrically connected to the relay layer through the conductive layer, and 
 at least an inside of the first conduction section is filled with an insulating material. 
   
     
     
         3 . The electro-optical device according to  claim 2 , wherein the first conduction section has an upper surface which is in contact with the reflective layer. 
     
     
         4 . The electro-optical device according to  claim 2 , wherein the second conduction section has a bottom surface which is positioned closest to the relay electrode.