Electrode structure for field effect transistor

Abstract

A Field Effect Transistor (FET) structure having: a semiconductor; a first electrode structure; a second electrode structure; and a third electrode structure for controlling a flow of carriers in the semiconductor between the first electrode structure and the second electrode structure; a dielectric structure disposed over the semiconductor and extending horizontally between first electrode structure, the second electrode structure and the third electrode structure; and a fourth electrode passing into the dielectric structure and terminating a predetermined, finite distance above the semiconductor for controlling an electric field in the semiconductor under the fourth electrode structure.

What is claimed is: 
     
         1 . A transistor structure, comprising:
 a semiconductor;   a first electrode structure;   a second electrode structure;   a third electrode structure for controlling a flow of carriers in the semiconductor between the first electrode structure and the second electrode structure;   a dielectric structure disposed over the semiconductor and extending horizontally between first electrode structure, the second electrode structure and the third electrode structure; and   a fourth electrode structure passing into the dielectric structure and terminating a predetermined, finite distance above the semiconductor.   
     
     
         2 . The transistor structure recited in  claim 1  wherein the fourth electrode structure is a field plate structure. 
     
     
         3 . The transistor structure recited in  claim 2  wherein the field plate structure is connected to the first electrode structure. 
     
     
         4 . The transistor structure recited in  claim 1  wherein the fourth electrode structure is connected to the first electrode structure. 
     
     
         5 . The transistor structure recited in  claim 1  wherein the first electrode structure and the fourth electrode structure are electrically isolated one from another. 
     
     
         6 . The transistor structure recited in  claim 1  wherein the first electrode structure, the second electrode structure and the fourth electrode structure are electrically isolated one from another. 
     
     
         7 . The transistor structure recited in  claim 1  wherein the first electrode structure and the second electrode structure are in Ohmic contact with the semiconductor. 
     
     
         8 . The transistor structure recited in  claim 5  wherein the first electrode structure and the second electrode structure are in Ohmic contact with the semiconductor. 
     
     
         9 . The transistor structure recited in  claim 6  wherein the first electrode structure and the second electrode structure are in Ohmic contact with the semiconductor. 
     
     
         10 . A Field Effect Transistor (FET) structure, comprising:
 a semiconductor;   a source electrode structure and a drain in Ohmic contact with the semiconductor,   a gate electrode for controlling a flow of carriers in the semiconductor between the source electrode and the drain electrode, the gate electrode being in contact with the semiconductor;   a dielectric structure disposed over the semiconductor and extending horizontally between gate electrode structure, the source electrode structure and the drain electrode structure; and   a field plate electrically connected to the source electrode, the field plate passing vertically into the dielectric structure and terminating a predetermined, finite distance above the semiconductor.   
     
     
         11 . A Field Effect Transistor (FET) structure, comprising:
 a semiconductor,   a source electrode structure and a drain electrode structure in Ohmic contact with the semiconductor,   a gate electrode structure for controlling a flow of carriers in the semiconductor between the source electrode structure and the drain electrode structure, the gate electrode structure being in contact with the semiconductor,   a dielectric structure disposed over the semiconductor and extending horizontally between gate electrode structure and the drain electrode structure; and   a field plate electrically connected to the source electrode, the field plate passing vertically into the dielectric structure and terminating a predetermined, finite distance above the semiconductor.   
     
     
         12 . A Field Effect Transistor (FET) structure, comprising:
 a semiconductor;   a source electrode structure and a drain electrode structure each having: an upper, electrical interconnect portion; and a lower Ohmic contact portion in Ohmic contact with the semiconductor, the upper, electrical interconnect portion passing vertically from an upper surface of the FET structure to the lower Ohmic contact portion;   a gate electrode for controlling a flow of carriers in the semiconductor between the source electrode structure and the drain electrode structure, the gate electrode structure having: an upper, electrical interconnect portion; and a lower contact portion in contact with the semiconductor, the upper, electrical interconnect portion of the gate electrode structure passing vertically into the upper surface of the FET structure to the lower contact portion;   a dielectric structure disposed over the semiconductor and extending horizontally between gate electrode structure and the drain electrode structure; and   a field plate electrically connected to the upper portion of the source electrode and passing vertically into the dielectric structure and terminating a predetermined, finite distance from the semiconductor.   
     
     
         13 . A Field Effect Transistor (FET) structure, comprising:
 a semiconductor;   a first dielectric structure disposed over the semiconductor,   a second dielectric structure disposed on the first dielectric structure;   a source electrode and a drain electrode each having: an upper, electrical interconnect portion; and a lower Ohmic contact portion in Ohmic contact with the semiconductor, the lower Ohmic contact portion passing vertically through the first dielectric structure to the semiconductor, the upper, electrical interconnect portion passing vertically into the second dielectric structure to the lower Ohmic contact portion;   a gate electrode for controlling a flow of carriers in the semiconductor between the source electrode and the drain electrode, the gate electrode having: an upper, electrical interconnect portion; and a lower portion in contact with the semiconductor; the lower portion; the upper, electrical interconnect portion passing vertically into the second dielectric structure to the lower portion   wherein a portion of the second dielectric structure extends horizontally between the gate electrode and the drain electrode; and   a field plate parallel to: the upper, electrical interconnect portion of the source electrode and the drain electrode; and the upper, electrical interconnect portion of the gate electrode, the field plate being disposed between the upper, electrical interconnect portion of the drain electrode and the upper, electrical interconnect portion of the gate electrode, the field plate having: an upper, electrical interconnect portion electrically connected to the upper portion of the source electrode, the upper, electrical interconnect portion of the field plate passing vertically from the upper surface of the FET structure, into the second dielectric layer, and terminating at a lower portion of the field plate, the lower portion of the field plate being disposed a predetermined, finite distance from the semiconductor.   
     
     
         14 . The Field Effect Transistor (FT) recited in  claim 13  wherein: the first dielectric structure comprises an etch stop layer and wherein the lower portion of the field plate terminates at the etch stop layer. 
     
     
         15 . The Field Effect Transistor (FET) recited in  claim 13  wherein: the first dielectric structure comprises an etch stop layer and wherein the lower portion of the field plate terminates at the upper surface of the first dielectric structure. 
     
     
         16 . The Field Effect Transistor (FET) recited in  claim 13  wherein: the second dielectric structure comprises an etch stop layer and wherein the lower portion of the field plate terminates within the second dielectric layer. 
     
     
         17 . The Field Effect Transistor (FET) recited in  claim 13  wherein the upper, electrical interconnect portion of the source electrode and the drain electrode; and the upper, electrical interconnect portion of the gate electrode are copper Damascene structures. 
     
     
         18 . The Field Effect Transistor (FET) recited in  claim 13  wherein the field plate and upper, electrical interconnect portion of the source electrode and the drain electrode; and the upper, electrical interconnect portion of the gate electrode are copper Damascene structures. 
     
     
         19 . The Field Effect Transistor (FET) recited in  claim 14  wherein the upper, electrical interconnect portion of the field plate is electrically connected to the upper portion of the source electrode through an interconnection structure and wherein the interconnection portion is a copper Damascene structure. 
     
     
         20 . The Field Effect Transistor (FET) recited in  claim 13  wherein: the lower portion of the field plate terminates on a metal layer disposed above the first dielectric structure layer. 
     
     
         21 . The Field Effect Transistor (FET) recited in  claim 20  wherein the upper, electrical interconnect portion of the field plate is electrically connected to the upper portion of the source electrode though an interconnection structure and wherein the interconnection portion is a copper Damascene structure. 
     
     
         22 . The transistor structure recited in  claim 1  wherein the first electrode structure, the second electrode structure, the third electrode structure and the fourth electrode structure are electrically isolated one from another. 
     
     
         23 . The transistor structure recited in  claim 22  wherein the first electrode structure is a source electrode structure, the second electrode structure is a drain electrode structure and the fourth electrode structure is an electrode structure for controlling an electric field in the semiconductor under the fourth electrode structure. 
     
     
         24 . The transistor structure recited in  claim 1  wherein the first electrode structure, the second electrode structure, the third electrode structure are electrically isolated one from another and the fourth electrode structure is connected to the first electrode structure. 
     
     
         25 . The transistor structure recited in  claim 24  wherein the fourth electrode structure is an electrode structure for controlling an electric field in the semiconductor under the fourth electrode structure.