Polarization device, method of manufacturing the same, liquid crystal device, and electronic apparatus

Abstract

The wire grid type polarization device includes a substrate and a plurality of metal layers that includes a first metal layer having a first side face, a second side face opposed to the first side face, and a top part. First and second dielectric layers are provided in the first side face, the second side face, and the top part of the first metal layer. The first dielectric layer is provided between the first metal layer and the second dielectric layer. The optical absorption rate of the first dielectric layer is less than that of the second dielectric layer.

What is claimed is: 
     
         1 . A polarization device comprising:
 a substrate;   a first metal layer that has a stripe shape;   a second metal layer that is provided adjacent to the first metal layer, the second metal layer having a stripe shape;   a groove that is provided between the first metal layer and the second metal layer, the groove having a bottom surface in the substrate;   a first dielectric layer that is provided at a side part of the first metal layer and a top part of the first metal layer; and   a second dielectric layer that is provided on the first dielectric layer,   wherein an optical absorption rate of the second dielectric layer is higher than that of the first dielectric layer,   wherein a substrate side end portion of the second dielectric layer is located at a side part of the first dielectric layer between the bottom surface of the groove and the top part of the first metal layer,   wherein a substrate side end portion of the first dielectric layer is located between the bottom surface of the groove and the substrate side end portion of the second dielectric layer.   
     
     
         2 . The polarization device according to  claim 1 , wherein the metal layer is formed of a material selected from aluminum, silver, copper, chrome, titanium, nickel, tungsten, and iron,
 wherein the first dielectric layer is formed of an oxide of the metal layer, and   wherein the second dielectric layer is formed of a material selected from silicon, germanium, molybdenum, and tellurium.   
     
     
         3 . The polarization device according to  claim 2 , wherein the first and second members are formed of the same material to each other. 
     
     
         4 . A projection type display apparatus, comprising:
 a light source;   a liquid crystal electro-optical device to which light emitted from the light source is incident;   a projective optical system that allows light passed through the liquid crystal electro-optical device to be incident to a surface to be projected; and   the polarization device according to  claim 1  provided on least one of between the light source and the liquid crystal electro-optical device on an optical path of the light emitted from the light source and between the liquid crystal electro-optical device and the projective optical system on an optical path of the light passed through the liquid crystal electro-optical device.   
     
     
         5 . A liquid crystal device, comprising:
 a liquid crystal layer interposed between a pair of substrates; and the polarization device according to  claim 1 , which is interposed between at least one substrate among the pair of substrates and the liquid crystal layer.   
     
     
         6 . An electronic apparatus comprising:
 the liquid crystal device according to  claim 5 .   
     
     
         7 . The polarization device according to  claim 1 , wherein the first metal layer and the second metal layer are formed of a material selected from aluminum, silver, copper, chrome, titanium, nickel, tungsten, and iron,
 wherein the first dielectric layer is formed of an oxide of the metal layers, and   wherein the second dielectric layer is formed of a material selected from silicon, germanium, molybdenum, and tellurium.   
     
     
         8 . A polarization device comprising:
 a substrate;   a first metal layer that has a stripe shape;   a second metal layer that is provided adjacent to the first metal layer, the second metal layer having a stripe shape;   a groove that is provided between the first metal layer and the second metal layer, the groove having a bottom surface in the substrate;   a dielectric layer that is provided at a side part of the first metal layer and a top part of the first metal layer; and   a semiconductor layer that is provided on the dielectric layer,   wherein an optical absorption rate of the semiconductor layer is higher than that of the dielectric layer,   wherein a substrate side end portion of the semiconductor layer is located at a side part of the dielectric layer between the bottom surface of the groove and the top part of the first metal layer,   wherein a substrate side end portion of the dielectric layer is located between the bottom surface of the groove and the substrate side end portion of the semiconductor layer.